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Inficon – Trigon BCG552
Advantages
- 3 + 1 sensing elements for extremely wide measurement range, cost reduction & space savings
- 2 filaments for Bayard-Alpert system
- Gas type independent pressure measurement above 10 Torr provides more reliable load lock control for any gas mixtures
- Differential pressure measurement eliminates uncertainty related to atmospheric pressure changes
- Automatic high vacuum Pirani adjustment reduces operator interventions
- Galvanic isolated electronics to avoid electric stray current
- Sliding emission mode to avoid pressure jumps and freeze when switching the emission stream
- Set point relays
- Bright & big OLED display (90° rotatable) with user interface
- Analog output, RS232C serial interface, EtherCAT®
- Usable in conjunction with VGC50x Controller series
- Backwards compatible to TripleGauge® BCG450
- RoHS compliance
Typical applications
- Pressure measurement in Semiconductor processes, transfer and loadlock chambers
- Industrial coating
- General vacuum measurement and control on systems in the low to ultra high vacuum range
Related products
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Inficon – Trigon BAG552
Add to cartAdvantages
- Pure Bayard-Alpert measuring system for a wide UHV & HV measurement range
- 2 filaments for Bayard-Alpert system
- Galvanic isolated electronics to avoid electric stray current
- Sliding emission mode to avoid pressure jumps and freeze when switching the emission stream
- Extended bakeability due to removable calibration data chips
- Set point relays
- Bright & big OLED display (90° rotateable) with user interface
- Analog output, RS232C serial interface, EtherCAT®
- Usable in conjunction with VGC50x Controller series
- RoHS compliance
Typical applications
- Pressure measurement in Semiconductor processes
- Industrial coating
- General vacuum measurement and control on systems in the high to ultra high vacuum range
-
Inficon – SK CDG025D
Add to cartAdvantages
- Full scale ranges from 100 mTorr … 1000 Torr
- Fast stability after power on
- Fast recovery from atmospheric pressure
- Corrosion resistant ceramic sensor
- Excellent long term signal stability
- Temperature compensated
- Sensor protected from contamination
- One pushbutton zero function
- Wide range power supply
Typical Applications
- Semiconductor manufacturing equipment for Etch, CVD, PVD, ALD
- Data storage and display manufacturing equipment
- Industrial vacuum equipment
- General high accuracy pressure measurement
-
Inficon – BAG302
Add to cartAdvantages
- Wide measurement range from 1.3 × 10-9 to 6.7×10-2 mbar(1 × 10-9 to 5 × 10-2 Torr)
- Two standard long-life yttrium oxide coated iridium filaments
- All-in-One active gauge with built-in display, set-point, analog output and standard integrated RS485 digital interface
- Bright digital OLED display with keypad for simple setup, operation and programming
- User programmable set point relay
- User programmable display units in mbar, Torr or Pa
- User selectable Auto-ranging of emission current
- Mechanical strength and ruggedness
- Choice of various flange options
- Easy to exchange sensing element
- Compliance & standards: CE, RoHS
- Direct drop in replaces Granville-Phillips® 354 Micro-Ion® Module – identical control functions including softwarecommands (RS485) (Granville-Phillips® and Micro-Ion® are registered trademarks of MKS Instruments, Andover, MA)
Typical applications
- Pressure measurement in semiconductor process and transfer chambers
- Industrial coating
- General vacuum measurement and control in the low to ultra high vacuum range
-
Inficon – PGE500 RS485/ Analog
Add to cartAdvantages
- Convection Enhanced Pirani Technology for wide measurement range and higher accuracy near atmosphere
- All-in-One active gauge with built-in display, 2 set points, 4 analog output signals, and 2 digital interfaces
- Bright digital OLED display with keypad for simple setup, calibration and operation
- 4 optional analog output signals (3 user selectable, 1 Default)
- Factory pre-set analog output signal or selectable via keypad
- Factory pre-set display units or selectable via keypad
- User programmable set point relays (factory pre-set on request for volume orders)
- Gold plated tungsten filament
- Mechanical strength, highly robust and less susceptible to mechanical shock and vibration
- Choice of flange options
- Compliance & standards: CE, RoHS
- Direct drop in replaces most Granville-Phillips® Mini-Convectron® modules (GP275) (Granville-Phillips® and Mini-Convectron® are registered trademarks of MKS Instruments, Andover, MA)
Typical applications
- Fore vacuum pressure measurement
- General vacuum measurement and control form low to the high vacuum range
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Inficon – MAG470
Add to cartAdvantages
- No filament to burn out
- Extended version, sensor bakeout up to 250°C
- Excellent ignition properties
- Easy to clean
- Metal-sealed feedthrough
- LED indicator for high voltage on
- Logarithmic analog output signal
Typical applications
- Ultra high vacuum pressure monitoring
- Base pressure for evaporation and sputtering systems
- General vacuum measurement and control in the medium and high vacuum range
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