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Inficon – Stripe CDG100Dhs

Advantages

  • High productivity – Faster than 2 ms response time
  • Flexible integration – EtherCAT fieldbus
  • Long lifetime – Proven ceramic sensor
  • Forget recalibration – 90 ppm/year full scale stability

Typical applications

  • Atomic layer deposition
  • High speed process control
  • PVD, CVD, Etch
  • General high temperature vacuum applications

 

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