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  UV-Litho-ACA

  $550.00

  • Minimum Line width:    1.0um
  • Minimum Feature size: 0.8 um
  • Writing Speed: 3 mm²/min @ 1um
  • 20mm²/min @ 1.5um
  • Light source: LED 405nm / 385nm
  • XY distance:  55mm
  • Overlay Accuracy: 350nm
  • minimum sample size: 3mm x 3mm
  • Maximum sample size: 150mm x 150 mm

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  UV-Litho-S

  $3,600.00

  • Minimum Line width:    1.0 um
  • Minimum Feature size: 0.8 um
  • Writing Speed: 1,200 mm²/min @ 1.0 um
  • 3,000mm²/min @  5.0 um
  • Light source: LD 405nm / 375nm
  • XY distance:  55mm
  • Overlay Accuracy: 200nm
  • Minimum sample size: 1 inch x 1 inch
  • Maximum sample size: 8 inch x 8 inch

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  UV-Litho-Y

  $6,400.00

  • Minimum Line width:     1.5um
  • Minimum Feature size: 1.2um
  • Writing Speed: 10 mm2/min @ 1.5um
  • Light source: LED 405nm / 385nm
  • XY distance:  55mm
  • Overlay Accuracy: 500nm
  • Minimum sample size: 3mm x 3mm
  • Maximum sample size: 50mm x 50 mm

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