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  UV-Litho-ACA

  $550.00

  • Minimum Line width:    1.0um
  • Minimum Feature size: 0.8 um
  • Writing Speed: 3 mm²/min @ 1um
  • 20mm²/min @ 1.5um
  • Light source: LED 405nm / 385nm
  • XY distance:  55mm
  • Overlay Accuracy: 350nm
  • minimum sample size: 3mm x 3mm
  • Maximum sample size: 150mm x 150 mm

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