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Part Number: UV-Litho-ACA

UV-Litho-ACA

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  • UV-Litho-ACA

    $550.00
    • Minimum Line width:    1.0um
    • Minimum Feature size: 0.8 um
    • Writing Speed: 3 mm2/min @ 1um
    • 20mm2/min @ 1.5um
    • Light source: LED 405nm / 385nm
    • XY distance:  55mm
    • Overlay Accuracy: 350nm
    • minimum sample size: 3mm x 3mm
    • Maximum sample size: 150mm x 150 mm
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