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  UV-Litho-Y

  $6,400.00

  • Minimum Line width:     1.5um
  • Minimum Feature size: 1.2um
  • Writing Speed: 10 mm2/min @ 1.5um
  • Light source: LED 405nm / 385nm
  • XY distance:  55mm
  • Overlay Accuracy: 500nm
  • Minimum sample size: 3mm x 3mm
  • Maximum sample size: 50mm x 50 mm

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