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  UV-Litho-Y

  $6,400.00

  • Minimum Line width:     1.5um
  • Minimum Feature size: 1.2um
  • Writing Speed: 10 mm2/min @ 1.5um
  • Light source: LED 405nm / 385nm
  • XY distance:  55mm
  • Overlay Accuracy: 500nm
  • Minimum sample size: 3mm x 3mm
  • Maximum sample size: 50mm x 50 mm

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  VPC-061 Vacuum Coater

  VPC-061 Vacuum Coater

  • Ultimate Pressure: 1.3 × 10⁻³ Pa, 6.6 × 10⁻⁴ Pa (LN₂)
  • Evacuation Time: 4.0 × 10⁻³ Pa/20min, 1.3 × 10⁻³ Pa/20min (LN₂)
  • Bell Jar Size: Glass belljar (dia. 150mm × 200mm(H))
  • Substrate Electrode Distance: Max 100mm
  • Evaporation Electrode Structure: 1 point
  • Recommended Substrate Size (Maximum Substrate Size): sq.25mm (sq.50mm)
  • Evaporation Power Supply: 0–10V 50A (Max)
  • Main Pump: Oil diffusion pump (air cooling) 50 L/sec
  • Backing Pump: Oil rotary vacuum pump 20 L/min
  • Liquid Nitrogen Trap: Equipped
  • Automatic Leak Valve: –
  • Control System: Manual control
  • Weight (Body): 38kg
  • Weight (Power Supply): 40kg
  • Overall Dimensions (Body): 434mm(W) × 422mm(D) × 673mm(H)
  • Overall Dimensions (Power Supply): 480mm(W) × 435.3mm(D) × 149mm(H)
  • Power Requirement (Body): Single phase, 50/60Hz, 100V, 0.63kVA
  • Power Supply: Single phase, 50/60Hz, 100V, 0.63kVA

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