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Category: Inficon

Inficon

Showing 1–16 of 57 results

  • Inficon – Augent OPG550

    Advantages

    • High speed leak detection allows chamber leak test
    • Increase of productivity and yield
    • Long life time, no filament burns, air inrush protection
    • Withstand process chemistry
    • Smart algorithm for easy integration
    • Compact design and small footprint
    • Reliable and fast start up

    Typical Applications

    • Chamber leak check, faster RoR (rate of rise) test
    • Leak check to find internal leaks from gas supply lines
    • Real time end point control
    • Gas type and concentrations control
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  • Inficon – BAG055

    Advantages

    • Long standing, reliable and proven gauge head design
    • Drop-in replacement thanks to its compact size, large choice of connection flanges and fittings
    • Dual yttrium oxide coated iridium filament cathode assembly
    • Electron bombardment (EB) degassing

    Typical applications

    • Industrial or R&D applications requiring precise vacuum measurement in the high vacuum range
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  • Inficon – BAG05x

    Advantages

    • Long standing, reliable and proven gauge head design
    • Drop-in replacement for most nude hot ion gauge heads
    • Wide range of emission currents (100 μA to 10 mA)
    • Available with single/dual yttrium oxide coated iridium and dual tungsten filament cathode assemblies
    • Degas: all models can be degassed using in electron bombardment (EB), BAG051, BAG052 and BAG053 can also be degassed using resistive degas (I2R)

    Typical applications

    • Industrial or R&D applications requiring precise vacuum measurement in the high/ultra-high vacuum range and high temperature bake-out
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  • Inficon – BAG302

    Advantages

    • Wide measurement range from 1.3 × 10-9 to 6.7×10-2 mbar(1 × 10-9 to 5 × 10-2 Torr)
    • Two standard long-life yttrium oxide coated iridium filaments
    • All-in-One active gauge with built-in display, set-point, analog output and standard integrated RS485 digital interface
    • Bright digital OLED display with keypad for simple setup, operation and programming
    • User programmable set point relay
    • User programmable display units in mbar, Torr or Pa
    • User selectable Auto-ranging of emission current
    • Mechanical strength and ruggedness
    • Choice of various flange options
    • Easy to exchange sensing element
    • Compliance & standards: CE, RoHS
    • Direct drop in replaces Granville-Phillips® 354 Micro-Ion® Module – identical control functions including softwarecommands (RS485) (Granville-Phillips® and Micro-Ion® are registered trademarks of MKS Instruments, Andover, MA)

    Typical applications

    • Pressure measurement in semiconductor process and transfer chambers
    • Industrial coating
    • General vacuum measurement and control in the low to ultra high vacuum range
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  • Inficon – BAG402

    Advantages

    • Measurement range from 5×10-10 mbar to 2.7×10-2 mbar (3.75×10-10 Torr to 5×10-2 Torr)
    • Excellent repeatability in the process pressure range from 10-8 … 10-2 mbar of 5%
    • Overpressure detection protects the filament from premature burnout
    • Two long-life yttrium oxide coated iridium filaments
    • Automatic emission current selection reduces control complexity
    • Easy to exchange sensing element with on-board calibration data guarantees high reproducibility
    • RoHS compliance

    Typical applications

    • Pressure measurement in semiconductor process and transfer chambers
    • Industrial coating
    • General vacuum measurement and control in the low to ultra high vacuum range
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  • Inficon – BCG450

    Advantages

    • BCG450 saves cost and tool space and reduces the complexity of vacuum measurement installation and setup
    • Gas-type-independent pressure measurement above 10 Torr provides more reliable loadlock control for any gas mixture
    • Pirani interlock protects the hot filament from premature burnout
    • Automatic high vacuum Pirani adjustment reduces operator interventions
    • Differential pressure measurement at atmosphere eliminates uncertainty related to atmospheric pressure changes
    • Easy-to-exchange sensing element with on-board calibration data guarantees reproducibility
    • Optional graphic display and Fieldbus interfaces available
    • RoHS compliance

    Typical applications

    • Pressure measurement in Semiconductor process, transfer and loadlock chambers
    • Industrial coating
    • General vacuum measurement and control on systems in the low to ultra high vacuum range
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  • Inficon – BPG400

    Advantages

    • Extremely wide measurement range from 5×10-10 mbar to atmosphere (3.8×10-10 Torr to atmosphere)
    • Excellent repeatability in the process pressure range from 10-8 … 10-2 mbar of 5%
    • The Pirani interlock protects the Bayard-Alpert system from premature filament burnout and excess contamination from high pressure operation
    • Long-life yttrium oxide coated iridium filament
    • Optional graphic display and Fieldbus interfaces available
    • Automatic high vacuum Pirani adjustment reduces operator interventions
    • RoHS compliance
    • General vacuum measurement and control in the low to ultra high vacuum range

    Typical applications

    • Pressure measurement in semiconductor process and transfer chambers
    • Industrial coating
    • General vacuum measurement and control in the low to ultra high vacuum range
    Add to cart
  • Inficon – BPG402-Sx

    Advantages

    • Extremely wide measurement range from 5×10-10 mbar to atmosphere (3.8×10-10 Torr to atmosphere)
    • Excellent repeatability in the process pressure range from 10-8 … 10-2 mbar of 5%
    • Pirani interlock protects the filament from premature burnout
    • Two long-life yttrium oxide coated iridium filaments
    • Optional graphic display and Fieldbus interfaces available
    • Automatic high vacuum Pirani adjustment reduces operator interventions
    • Easy to exchange sensing element with on-board calibration data guarantees high reproducibility
    • RoHS compliance

    Typical applications

    • Pressure measurement in semiconductor process and transfer chambers
    • Industrial coating
    • General vacuum measurement and control in the low to ultra high vacuum range
    Add to cart
  • Inficon – Cube CDGsci

    Advantages

    • True high precision pressure measurement – Ceramic technology
    • Full stable output – Proven by PTB
    • Flexible communication – Various modern interfaces
    • All functions integrated – No controller required
    • Direct mounting to chamber – Optimized center of gravity
    • Transportation without isolation valve possible

    Typical applications

    • Transfer standard
    • Main reference gauge
    • Research
    • In-house standard
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  • Inficon – Edge CDG025D2

    Advantages

    • Easy integration, EtherCAT, wide variety of full scales and flanges, standard with two set points
    • Easy one push button or remote signal zero command, zero offset adjustable
    • Diagnostic port for quick service and maintenance
    • Corrosion resistant ceramic sensor
    • Excellent long term signal stability
    • Temperature compensated
    • Sensor protected from contamination
    • Compliance & standards: CE, EN, UL, SEMI, RoHS

    Typical applications

    • Etch, PVD and other semiconductor production processes
    • Data storage and display manufacturing equipment
    • Industrial vacuum equipment
    • General high accuracy pressure measurement
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  • Inficon – Edge CDG045D2

    Advantages

    • Compact, saves valuable tool space
    • Easy integration, EtherCAT, wide variety of full scales and flanges, standard with two set points
    • Easy one push button or remote signal zero command, zero offset adjustable
    • Diagnostic port for quick service and maintenance
    • Two year warranty, longer life time with advanced heating concept and gauge protection
    • No long term recalibration due to excellent signal stability and repeatability, even in harsh plasma applications
    • Compliance & standards: CE, EN, UL, SEMI, RoHS

    Typical applications

    CVD, Etch, PVD and other semiconductor production processes

    Add to cart
  • Inficon – Edge CDG100D2

    Advantages

    • Compact, saves valuable tool space
    • Easy integration, EtherCAT, wide variety of full scales and flanges, standard with two set points
    • Easy one push button or remote signal zero command, zero offset adjustable
    • Diagnostic port for quick service and maintenance
    • Two year warranty, longer life time with advanced heating concept and gauge protection
    • No long term recalibration due to excellent signal stability and repeatability, even in harsh plasma applications
    • Compliance & standards: CE, EN, UL, SEMI, RoHS

    Typical applications

    CVD, Etch, PVD and other semiconductor production processes

    Add to cart
  • Inficon – Gemini MxG5xx

    Advantages

    • Long lifetime in harsh environments
    • Low magnetic stray field
    • Reliable fast ignition
    • Fastest maintenance – replaceable insert
    • Compact size – easy to integrate
    • Corrosion proof feed-through & sensor element
    • Selectable measuring current
    • 2 relay setpoints (in conjunction with MxG55x PROFINET and EtherCAT)
    • PROFINET, EtherCAT and RS232/ RS485 digital interace

    Typical applications

    • Base pressure monitoring and control, from atmosphere to high vacuum in evaporation and sputter coating applications.
    • General vacuum measurement – industrial furnaces, architectural glass, semiconductor, Refrigeration/ air conditioning and production laboratory`s
    • Analytical and R&D applications – mass spectrometry, electron microscopes, ophthalmic, optical, medical and high energy physics.
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  • Inficon – HPG400

    Advantages

    • HPG400 saves cost and tool space and reduces the complexity of vacuum system installation and setup
    • The high pressure hot ion gauge delivers accurate, reliable pressure measurements from 1×10-5 … 1 mbar for improved process control
    • User selectable hot ion emission activation between 5×10-2 and 1 mbar
    • Pirani interlock protects the hot filament from premature burnout
    • Optional graphic display and Fieldbus interfaces available
    • Automatic high vacuum Pirani adjustment reduces operator interventions
    • RoHS compliance

    Typical applications

    • Sputter applications in semiconductor manufacturing, electronics and media industry
    • Industrial coating
    • General vacuum measurement and control in the low to high vacuum range
    Add to cart
  • Inficon – IE414, IE514

    Advantages

    • High accuracy of the measurements due to individually calibrated sensing system
    • Exchangeable cathode
    • Extreme high temperature bake-out up to 400 °C

    IE414

    • Bayard-Alpert sensing principle
    • Measurement range to 2×10-11 mbar
    • Modulation of the cathode emission current (in combination with the IM540 vacuum gauge controller)

    IE514

    • Extractor sensing principle
    • Lowest measurement limit, down to 2×10-12 mbar
    • Significant reduction of X-ray and ion desorption effects

    Typical applications

    • Scientific and R&D applications requiring precise vacuum measurement in the ultra-high vacuum range and high temperature bake-out
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  • Inficon – IRC081

    • Operating and display solution for accurate vacuum pressure measurement
    • User control on all IRG080 gauge parameters set
    • Simple manual operation with 5 potentiometers
    • User Interface connection via USB-B port to PC
    • PC Software in LabVIEWTM
    • Data log and parameter log functionality
    • External port for status and vacuum interlock

     

    Add to cart

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