Showing 17–32 of 70 results

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  Inficon – Edge CDG100D2

  Advantages

  • Compact, saves valuable tool space
  • Easy integration, EtherCAT, wide variety of full scales and flanges, standard with two set points
  • Easy one push button or remote signal zero command, zero offset adjustable
  • Diagnostic port for quick service and maintenance
  • Two year warranty, longer life time with advanced heating concept and gauge protection
  • No long term recalibration due to excellent signal stability and repeatability, even in harsh plasma applications
  • Compliance & standards: CE, EN, UL, SEMI, RoHS

  Typical applications

  CVD, Etch, PVD and other semiconductor production processes

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  Inficon – Gemini MxG5xx

  Advantages

  • Long lifetime in harsh environments
  • Low magnetic stray field
  • Reliable fast ignition
  • Fastest maintenance – replaceable insert
  • Compact size – easy to integrate
  • Corrosion proof feed-through & sensor element
  • Selectable measuring current
  • 2 relay setpoints (in conjunction with MxG55x PROFINET and EtherCAT)
  • PROFINET, EtherCAT and RS232/ RS485 digital interace

  Typical applications

  • Base pressure monitoring and control, from atmosphere to high vacuum in evaporation and sputter coating applications.
  • General vacuum measurement – industrial furnaces, architectural glass, semiconductor, Refrigeration/ air conditioning and production laboratory`s
  • Analytical and R&D applications – mass spectrometry, electron microscopes, ophthalmic, optical, medical and high energy physics.

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  Inficon – HPG400

  Advantages

  • HPG400 saves cost and tool space and reduces the complexity of vacuum system installation and setup
  • The high pressure hot ion gauge delivers accurate, reliable pressure measurements from 1×10^-5 … 1 mbar for improved process control
  • User selectable hot ion emission activation between 5×10^-2 and 1 mbar
  • Pirani interlock protects the hot filament from premature burnout
  • Optional graphic display and Fieldbus interfaces available
  • Automatic high vacuum Pirani adjustment reduces operator interventions
  • RoHS compliance

  Typical applications

  • Sputter applications in semiconductor manufacturing, electronics and media industry
  • Industrial coating
  • General vacuum measurement and control in the low to high vacuum range

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  Inficon – IE414, IE514

  Advantages

  • High accuracy of the measurements due to individually calibrated sensing system
  • Exchangeable cathode
  • Extreme high temperature bake-out up to 400 °C

  IE414

  • Bayard-Alpert sensing principle
  • Measurement range to 2×10^-11 mbar
  • Modulation of the cathode emission current (in combination with the IM540 vacuum gauge controller)

  IE514

  • Extractor sensing principle
  • Lowest measurement limit, down to 2×10^-12 mbar
  • Significant reduction of X-ray and ion desorption effects

  Typical applications

  • Scientific and R&D applications requiring precise vacuum measurement in the ultra-high vacuum range and high temperature bake-out

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  Inficon – IRC081

  • Operating and display solution for accurate vacuum pressure measurement
  • User control on all IRG080 gauge parameters set
  • Simple manual operation with 5 potentiometers
  • User Interface connection via USB-B port to PC
  • PC Software in LabVIEW^TM
  • Data log and parameter log functionality
  • External port for status and vacuum interlock

   

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  Inficon – IRG080

  Advantages

  • Developed for applications requiring high measurement accuracy in the high and ultra-high vacuum range
  • Electrode system configuration according to ISO TS 6737
  • True pressure for all gas species thanks to predictable relative gas sensitivity with small uncertainty
  • Stable electron emission and lack of influence from ESD or X-ray effects
  • Reproducible and easy to transport
  • Bakeable to 165 °C (with temperature resistant cable) or up to 400 °C without connector unit
  • Mu-metal intermediate piece available for magnetic shielding purposes

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  Inficon – MAG050, MAG060, MAG070

  Advantages

  • Reliable and proven gauge head design, based on the inverted magnetron principle
  • Large vacuum pressure measurement range capability from 1×10^-11 (MAG070) to 5×10^-3  mbar
  • Bakeable to 150 °C (MAG050) or 250 °C (MAG060, MAG070)
  • Good ignition properties
  • Corrosion resistant with ceramic feedthrough
  • Radiation resistant design available (MAG060, MAG070)
  • Easy to maintain, low cost of ownership

  Typical applications

  • General vacuum measurement and control for demanding and/or high temperature applications from low to the high vacuum range

   

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  Inficon – MAG084

  Advantages

  • Developed to sustain operation in strong external magnetic fields
  • Reliable and proven gauge head design, based on the inverted magnetron principle
  • Innovative double ionization chamber principle
  • Bakeable to 230 °C
  • Good ignition properties
  • Corrosion resistant with ceramic feedthrough
  • Radiation resistant design to 1×10⁷ Gy
  • Easy to maintain, low cost of ownership

  Typical applications

  • Special Fusion and R&D applications presenting strong external magnetic fields

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  Inficon – MAG470

  Advantages

  • No filament to burn out
  • Extended version, sensor bakeout up to 250°C
  • Excellent ignition properties
  • Easy to clean
  • Metal-sealed feedthrough
  • LED indicator for high voltage on
  • Logarithmic analog output signal

  Typical applications

  • Ultra high vacuum pressure monitoring
  • Base pressure for evaporation and sputtering systems
  • General vacuum measurement and control in the medium and high vacuum range

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  Inficon – MPG40X

  Advantages

  • Combination gauge – Inverted Magnetron & Pirani
  • Wide measurement range from 5 x 10^-9 mbar to atmosphere
  • No filament to burn out
  • Excellent ignition properties
  • Easy to clean
  • FPM or metal-sealed feedthrough
  • LED indicator for high voltage on
  • Logarithmic analog output signal

  Typical applications

  • High vacuum pressure monitoring
  • Base pressure for evaporation and sputtering systems
  • General vacuum measurement and control in the medium and high vacuum range

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  Inficon – PBR 260

  Advantages

  • PBR 260 Pirani/Bayard-Alpert hot cathode combination gauge offers general vacuum measurement and control in the low to ultrahigh vacuum range with just one compact measuring device
  • Flange size: DN 25 ISO-KF, DN 40 CF-R, DN 40 ISO-KF
  • Maximum pressure applies to inert gases and temperatures of less then 55°C
  • Highly accurate, excellent repeatability in the process range 10^-8 … 10^-2 mbar
  • Bayard-Alpert sensor ON/OFF automatically controlled by Pirani sensor
  • Long-life yttrium oxide coated iridium filament
  • RoHS compliance

  Drop in compatible to other manufacturers PBR 260 Pirani/Bayard-Alpert hot cathode gauges

  • Part number IGG27000 matches PT R27 000
  • Part number IGG27001 matches PT R27 001
  • Part number IGG27002 matches PT R27 00

  Typical applications

  • General pressure measurement in semiconductor and analytical process environment
  • Optical and other industrial coating processes

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  Inficon – PCG55x

  • Gas type independent above 10 mbar – allows safe venting with any gas mixture
  • High accuracy and reproducibility at atmosphere – for reliable, fast atmospheric pressure detection
  • Versatile of mounting orientation – provides engineering freedom in tool design
  • Available with Tungsten (PCG550) or Nickel (PCG552) filament or with a fully ceramic coated (PCG554) sensor unit for highly corrosive applications
  • Latest EtherCAT protocol Standard ETG.5003.2080 S (R) V1.3.0
  • Easy to exchange plug & play sensor element with on-board calibration data – guarantees high reproducibility and low cost of ownership
  • Selectable output signal for easy integration
  • Optional atmospheric switch, display and digital interfaces
  • Compliance & standards: CE, EN, UL, CSA, RoHS

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  Inficon – PGD500

  Advantages

  • User selectable measurement unit (Pa, mbar or Torr)
  • Compact bench top model design can be easily mounted in a panel or 19″ rack
  • 0 to 10 V output signal from the gauge is available for use in PLC or with a chart recorder
  • One free adjustable set point
  • CE certified

  Typical Applications

  • Fore vacuum pressure measurement
  • Pressure measurement on evacuation/filling stations for RAC applications
  • Pressure measurement in light bulb production lines
  • General vacuum measurement and control in the medium and rough vacuum range

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  Inficon – PGE050

  Advantages

  • Convection enhanced Pirani technology for wide measurement range and higher accuracy near atmosphere
  • Gold plated tungsten filament
  • Mechanical robust and less susceptible to mechanical shock and vibration
  • Large choice of flange options
  • Compliance & standards: CE, RoHS
  • Direct drop in replaces Granville-Phillips^® Convectron^® gauge sensor (same plug/ pinouts)
  • PGE050 accepts Granville-Phillips® Convectron® controllers, cables and modules
  • Ideal gauge sensor for upgrading your installed Pirani and thermocouple gauge

  Typical applications

  • General vacuum measurement and control from atmosphere to high vacuum range

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  Inficon – PGE300

  Advantages

  • Convection Enhanced Pirani Technology for wide measurement range and higher accuracy near atmosphere
  • All-in-One active gauge with built-in display, 1 set point and 3 selectable analog output signals
  • Bright digital LED display features a user friendly for calibration and operation
  • 3 optional analog output signals (user selectable)
  • Factory pre-set analog output signal or selectable via user interface
  • Factory pre-set display units or selectable via user interface
  • User programmable set point relays
  • Gold plated tungsten filament
  • Mechanical strength, highly robust and less susceptible to mechanical shock and vibration
  • Choice of flange options
  • Compliance & standards: CE, RoHS
  • Direct drop in replaces most Granville-Phillips^® Mini-Convectron^® modules (GP275) and ideal device forupgrading your installed thermocouple gauges (Granville-Phillips^® and Mini-Convectron^® are registered trademarks of MKS Instruments, Andover, MA)

  Typical applications

  • Fore vacuum pressure measurement
  • General vacuum measurement and control from low to the high vacuum range

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  Inficon – PGE500 DeviceNet

  Advantages

  • Convection Enhanced Pirani Technology for wide measurement range and higher accuracy near atmosphere
  • All-in-One active gauge with built-in display, 2 set points, and digital DeviceNet interface
  • Bright digital OLED display with keypad for simple setup, calibration and operation
  • Factory pre-set display units for measure or selectable via keypad
  • User programmable set point relays (factory pre-set on request for volume orders)
  • Gold plated tungsten filament or platinum filament for corrosive applications
  • Mechanical strength, highly robust and less susceptible to mechanical shock and vibration
  • Field replaceable spare sensor units
  • Choice of flange options
  • Compliance & standards: CE, RoHS
  • Direct drop-in plug-compatible replacement for the DeviceNet versions of MKS / Granville-Phillips® Mini-Convectron® (GP275 Modules) Granville-Phillips® and Mini-Convectron® are registered trademarks of MKS Instruments, Andover, MA

  Typical applications

  • Fore vacuum pressure measurement
  • General vacuum measurement and control form low to the high vacuum range

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