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Category: Spare Parts

Spare Parts

Showing 33–48 of 70 results

  • Inficon – PGE500 RS485/ Analog

    Advantages

    • Convection Enhanced Pirani Technology for wide measurement range and higher accuracy near atmosphere
    • All-in-One active gauge with built-in display, 2 set points, 4 analog output signals, and 2 digital interfaces
    • Bright digital OLED display with keypad for simple setup, calibration and operation
    • 4 optional analog output signals (3 user selectable, 1 Default)
    • Factory pre-set analog output signal or selectable via keypad
    • Factory pre-set display units or selectable via keypad
    • User programmable set point relays (factory pre-set on request for volume orders)
    • Gold plated tungsten filament
    • Mechanical strength, highly robust and less susceptible to mechanical shock and vibration
    • Choice of flange options
    • Compliance & standards: CE, RoHS
    • Direct drop in replaces most Granville-Phillips® Mini-Convectron® modules (GP275) (Granville-Phillips® and Mini-Convectron® are registered trademarks of MKS Instruments, Andover, MA)

    Typical applications

    • Fore vacuum pressure measurement
    • General vacuum measurement and control form low to the high vacuum range
    Add to cart
  • Inficon – Porter CDG020D

    Benefits

    • Excellent span stability – gas type independent
    • Alumina sensor
    • Compact, smallest size in it’s class
    • Easy integration, any mounting orientation
    • Digital signal processing
    • Maintenance free

    Typical applications

    • Vacuum coating
    • Vacuum monitoring
    • Sterilization
    • Food & packaging
    • Vacuum oven, puller
    • Analytical
    • Chemical vacuum processes
    Add to cart
  • Inficon – PPG550

    Advantages

    • Gas type independent above 2 mbar – allows safe venting with any gas mixture
    • High accuracy and reproducibility at atmosphere – for reliable, fast atmospheric pressure detection
    • Versatile of mounting orientation – provides engineering freedom in tool design
    •  Selectable analog output signal for easy system integration
    •  Digital interfaces RS232/ RS485
    • Compliance & standards: CE, EN, UL, CSA, RoHS
    • Able to direct drop in replace MKS910 “DualTrans™ MicroPirani™ – Absolute Piezo Vacuum Pressure Transducers” as well as MKS925  “Micro Pirani™ Vacuum Pressure Transducers”. DualTrans™ MicroPirani™ are registered trademarks of MKS Instruments, Andover, MA
    • Compliance & standards: CE, EN, UL, CSA, RoHS

    Typical applications

    • Use in Analytical equipment/ mass spectrometers
    • Physical vapor deposition
    • Fore-line measurement
    •  Gas-backfilling
    Add to cart
  • Inficon – PPG570

    Advantages

    • Gas type independent above 2 mbar – allows safe venting with any gas mixture
    • High accuracy and reproducibility at atmosphere – for reliable, fast atmospheric pressure detection
    •  Atmospheric ambient pressure measurement
    • Up to 3 solid state relays
    • Versatile of mounting orientation – provides engineering freedom in tool design
    •  Selectable analog output signal for easy system integration
    • Digital interfaces RS232/ RS485
    • Able to direct drop in replace MKS901P “MicroPirani™ – and Piezo Loadlock Vacuum Pressure Transducer”.
    • Compliance & standards: CE, EN, UL, CSA, RoHS

    Typical applications

    • Semiconductor load-lock applications
    • Use in Analytical equipment/ mass sepctrometers
    • Physical vapor deposition
    • Physical vapor deposition
    Add to cart
  • Inficon – PSG010, PSG017 & PSG018

    Advantages

    • Elastomer (PSG010) or metal-sealed (PSG017, PSG018) design
    • Specified high measurement accuracy and repeatability
    • Bake-out temperature up to 100 °C (PSG010) / 250 °C (PSG017, PSG018)
    • Ionizing radiation resistant up to 106 Gy (PSG017, PSG018)
    • Corrosion resistance with Ni filament (PSG017)
    • Cable length up to 100 m (500 m with PI 300 DL/CP 300 T11L)

    Typical applications

    • General vacuum measurement and control for demanding and/or high temperature applications from low to the high vacuum range
    Add to cart
  • Inficon – PSG50x

    Advantages

    • Easy push button ATM and HV adjustment
    • Space saving rugged design
    • Aluminum housing
    • Mounts in any orientation
    • Stainless steel measuring cell with metal-sealed feedthrough
    • Logarithmic signal output for easy integration
    • 10 bar absolute overpressure with threaded connections
    • 250 °C bakeable version
    • Nickel filament option for corrosive applications
    • Ceramic feedthrough for extremely corrosive applications (PSG510 & PSG512)
    • Optional setpoints
    • RoHS compliance

    Typical applications

    • Controlling high vacuum ionization gauges
    • Fore vacuum pressure monitoring
    • Safety circuits in vacuum systems
    • General vacuum measurement and control in the fine and rough vacuum range
    Add to cart
  • Inficon – PSG55x

    Advantages

    • Available with Tungsten (PSG550) or Nickel (PSG552) filament or with a fully ceramic coated (PSG554) sensor unit for highly corrosive applications
    • Optional display, setpoints and digital interfaces
    • Latest EtherCAT protocol Standard ETG.5003.2080 S (R) V1.3.0
    • Easy to exchange plug & play sensor element with on-board calibration data – guarantees high reproducibility and low cost of ownership
    • Selectable output signal and various plug versions for easy integration
    • Mounts in any orientation – provides engineering freedom in tool design
    • Diagnostic port on all versions
    • Compliance & standards: CE, EN, UL, CSA, RoHS

    Typical applications

    •  Fore vacuum pressure measurement
    •  Safety circuits in vacuum systems
    •  General vacuum measurement and control from low to the high vacuum range
    Add to cart
  • Inficon – SK CDG025D

    Advantages

    • Full scale ranges from 100 mTorr … 1000 Torr
    • Fast stability after power on
    • Fast recovery from atmospheric pressure
    • Corrosion resistant ceramic sensor
    • Excellent long term signal stability
    • Temperature compensated
    • Sensor protected from contamination
    • One pushbutton zero function
    • Wide range power supply

    Typical Applications

    • Semiconductor manufacturing equipment for Etch, CVD, PVD, ALD
    • Data storage and display manufacturing equipment
    • Industrial vacuum equipment
    • General high accuracy pressure measurement
    Add to cart
  • Inficon – SKY CDG025D-X3

    Benefits

    • Full scale ranges from 100 mTorr … 1000 Torr
    • Fast stability after power on
    • Fast recovery from atmospheric pressure
    • Corrosion resistant ceramic sensor
    • Excellent long term signal stability
    • Temperature compensated
    • Sensor double protected from contamination
    • One pushbutton zero function
    • Wide range power supply
    • 2 setpoints
    • RS232 interface
    • Clean room compliant

    Typical applications

    • Semiconductor manufacturing equipment for Etch, CVD, PVD, ALD
    • Data storage and display manufacturing equipment
    • Industrial vacuum equipment
    • General high accuracy pressure measurement
    Add to cart
  • Inficon – SKY CDG025D-X3, 4-20mA

    Advantages

    • Full scale ranges from 100 mTorr … 1000 Torr
    • Fast stability after power on
    • Fast recovery from atmospheric pressure
    • Corrosion resistant ceramic sensor
    • Excellent long term signal stability
    • Temperature compensated
    • Sensor double protected from contamination
    • One pushbutton zero function
    • Interface with 2-wire current loop
    • Long cable distance (<300m)
    • Low energy gauge
    • Remote zero included
    • Clean room compliant
    • Status LED

    Typical applications

    • Chemical vacuum
    • Energy application
    • Industrial vacuum equipment
    Add to cart
  • Inficon – SKY CDG045D

    Advantages

    • Lower CoO (cost of ownership), 50% faster warm up, energy efficient low power consumption
    • Easy integration, wide variety of full scales, flanges and interfaces, standard with two set points
    • Easy one push button or remote signal zero command, zero offset adjustable
    • Diagnostic port for quick service and maintenance
    • Two year warranty, longer life time with advanced heating concept and gauge protection
    • No long term recalibration due to excellent signal stability and repeatability, even in harsh plasma applications
    • Compliance & standards: CE, EN, UL, SEMI, RoHS

    Typical applications

    • Etch, CVD, PVD and other semiconductor production processes
    • Chemical and corrosive vacuum processes
    • General thin film and vacuum processes
    • Reference sensor for monitoring of test instruments according to international standards
    • Transfer standard for traceability measurements
    Add to cart
  • Inficon – SKY CDG100D

    Advantages

    • Lower CoO (cost of ownership), 50% faster warm up, energy efficient low power consumption
    • Easy integration, wide variety of full scales, flanges and interfaces, standard with two set points
    • Easy one push button or remote signal zero command, zero offset adjustable
    • Diagnostic port for quick service and maintenance
    • Two year warranty, longer life time with advanced heating concept and gauge protection
    • No long term recalibration due to excellent signal stability and repeatability, even in harsh plasma applications
    • Compliance & standards: CE, EN, UL, SEMI, RoHS

    Typical applications

    • Etch, CVD, PVD and other semiconductor production processes
    • Chemical and corrosive high temperature processes
    • General thin film and vacuum processes requiring gauge protection
    Add to cart
  • Inficon – SKY CDG160D

    Advantages

    • Lower CoO (cost of ownership), 50% faster warm up, energy efficient low power consumption
    • Easy integration, wide variety of full scales, flanges and interfaces, standard with two set points
    • Easy one push button or remote signal zero command, zero offset adjustable
    • Diagnostic port for quick service and maintenance
    • Two year warranty, longer life time with heating concept and gauge protection
    • No long term recalibration due to excellent signal stability and repeatability, even in harsh plasma applications
    • Compliance & standards: CE, EN, UL, SEMI, RoHS

    Typical applications

    • Etch, CVD, PVD and other semiconductor production processes
    • Chemical and corrosive high temperature processes
    • General thin film and vacuum processes requiring gauge protection
    Add to cart
  • Inficon – SKY CDG200D

    Advantages

    • Lower CoO (cost of ownership), 50% faster warm up, energy efficient low power consumption
    • Easy integration, wide variety of full scales, flanges and interfaces, standard with two set points
    • Easy one push button or remote signal zero command, zero offset adjustable
    • Diagnostic port for quick service and maintenance
    • Two year warranty, longer life time with heating concept and gauge protection
    • No long term recalibration due to excellent signal stability and repeatability, even in harsh plasma applications
    • Compliance & standards: CE, EN, UL, SEMI, RoHS

    Typical applications

    • Etch, CVD, PVD and other semiconductor production processes
    • Chemical and corrosive high temperature processes
    • General thin film and vacuum processes requiring gauge protection
    Add to cart
  • Inficon – Spot CDS500D

    Advantages

    • The miniature sensor offers a high accuracy
    • Excellent repeatability and long-term stability
    • Weldable feedthrough for custom integration and calibration, or welded custom flange for integration of factory calibrated sensor
    • Sensor electronics with SPI interface for easy integration
    • Fast response time

    Typical applications

    • For integration into custom vacuum instrumentation and systems
    Add to cart
  • Inficon – Spot CDS530D

    Advantages

    • The dual miniature sensor offers a high accuracy in a wide measurement range
    • Wide range, high precision
    • Excellent repeatability and long-term stability
    • Sensor electronics with SPI interface for easy integration
    • Welded custom flange for integration of calibrated sensor
    • Fast response time
    Add to cart

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