Category: Spare Parts
Spare Parts
Showing 49–64 of 70 results
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Inficon – Stripe CDG045Dhs
Add to cartAdvantages
- High productivity – Faster than 2 ms response time (FS > 50 mTorr)
- Flexible integration – EtherCAT fieldbus
- Long lifetime – Proven ceramic sensor
- Forget recalibration – 90 ppm/year full scale stability
Typical applications
- Atomic layer deposition
- High speed process control
- PVD, CVD, Etch
- General high temperature vacuum applications
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Inficon – Stripe CDG100Dhs
Add to cartAdvantages
- High productivity – Faster than 2 ms response time
- Flexible integration – EtherCAT fieldbus
- Long lifetime – Proven ceramic sensor
- Forget recalibration – 90 ppm/year full scale stability
Typical applications
- Atomic layer deposition
- High speed process control
- PVD, CVD, Etch
- General high temperature vacuum applications
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Inficon – Trigon BAG552
Add to cartAdvantages
- Pure Bayard-Alpert measuring system for a wide UHV & HV measurement range
- 2 filaments for Bayard-Alpert system
- Galvanic isolated electronics to avoid electric stray current
- Sliding emission mode to avoid pressure jumps and freeze when switching the emission stream
- Extended bakeability due to removable calibration data chips
- Set point relays
- Bright & big OLED display (90° rotateable) with user interface
- Analog output, RS232C serial interface, EtherCAT®
- Usable in conjunction with VGC50x Controller series
- RoHS compliance
Typical applications
- Pressure measurement in Semiconductor processes
- Industrial coating
- General vacuum measurement and control on systems in the high to ultra high vacuum range
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Inficon – Trigon BCG552
Add to cartAdvantages
- 3 + 1 sensing elements for extremely wide measurement range, cost reduction & space savings
- 2 filaments for Bayard-Alpert system
- Gas type independent pressure measurement above 10 Torr provides more reliable load lock control for any gas mixtures
- Differential pressure measurement eliminates uncertainty related to atmospheric pressure changes
- Automatic high vacuum Pirani adjustment reduces operator interventions
- Galvanic isolated electronics to avoid electric stray current
- Sliding emission mode to avoid pressure jumps and freeze when switching the emission stream
- Set point relays
- Bright & big OLED display (90° rotatable) with user interface
- Analog output, RS232C serial interface, EtherCAT®
- Usable in conjunction with VGC50x Controller series
- Backwards compatible to TripleGauge® BCG450
- RoHS compliance
Typical applications
- Pressure measurement in Semiconductor processes, transfer and loadlock chambers
- Industrial coating
- General vacuum measurement and control on systems in the low to ultra high vacuum range
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Inficon – Trigon BPG552
Add to cartAdvantages
- Dual Gauge (2 sensing elements) for a wide measurement range, cost reduction & space savings
- 2 filaments for Bayard-Alpert system
- Pirani interlock protection to avoid premature filament burnout
- Automatic high vacuum Pirani adjustment reduces operator interventions
- Galvanic isolated electronics to avoid electric stray current
- Sliding emission mode to avoid pressure jumps and freeze when switching the emission stream
- Extended bakeability due to removable calibration data chips
- Set point relays
- Bright & big OLED display (90° rotatable) with user interface
- Analog output, RS232C serial interface, EtherCAT®
- Usable in conjunction with VGC50x Controller series
- Backwards compatible to BPG402
- RoHS compliance
Typical applications
- Pressure measurement in Semiconductor processes
- Industrial coating
- General vacuum measurement and control on systems in the low to ultra high vacuum range
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Inficon – VGC031
Add to cartAdvantages
- Displays and control wide measurement range from 1.3×10-4 up to 1333 mbar
- Bright digital OLED display with keypad for simple set up and Operation
- 4 user selectable analog output signals, 2 set point relays
- RS232/RS485 digital Interface
- Space saving design – 1/8″ DIN panel mount housing for rack mount installation or as standalone unit
- Powered through user supplied 12 to 28 V (dc) or by INFICON’s VGC031 Power Supply
- Compliance & standards: CE, RoHS
- Replacement capability for Granville-Phillips® 375 and 475 controllers and 275 Convectron® gauge sensors and gauge cable (note: remote interface, relay and power connectors are different)
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Inficon – VGC083
Add to cartAdvantages
- Flexible solution for vacuum pressure monitoring and controlling from atmosphere down to ultra-high vacuum
- Clear and simple operation with three individual bright LED displays
- Parameter, sensor and general settings with softkeys
- User selectable filament, degas electron bombardment or I2RÂ resistive heating for gauge conditioning depending on gauge head type
- Three analog outputs, user assignable to a single gauge or to gauges combinations
- Six assignable single pole double throw setpoint relays
- Ion gauge overpressure protection: sensor 1 can be automatically turned on/off from sensor 2 or 3
- Remote digital I/O sensor and emission on/off, RS232 / RS485 serial communication
- Direct drop in replacement opportunity for Granville-Phillips® Bayard-Alpert Gauge Controller 307 and accessories
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Inficon – VGC50x
Add to cartAdvantages
- Simple operation with dot matrix menu guided display for parameter, sensor or general settings
- Very bright and clear Display for long distance Instrument read- out
- Bar graph display with setpoints’s or pressure vs. time display
- Data log and parameter log function with USB port (rear side) and USB stick (front side)
- Ethernet interface
- Firmware upgrade available online or with USB stick
- Two free definable setpoints per channel with adjustable hysteresis
- High Resolution – 16 bit A/D converter
- Automatic identification of the INFICON active gauges
- Programmable 0 to 10 V Chart Recorder Output with logarithmic/ linear characteristics for single gauge or gauge combination (only VGC502 and VGC503)
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Inficon – VGD500
Add to cartAdvantages
- 4 Digit display for easy read out
- Large 10mm active LED display –
readable from distance and wide range gauge of angle - In-line plug design
- 15pin D-Sub, no extra power connection
- Compact small size
- Compatible with all Fullscale ≥100mTorr
- pressure Units selectable (Torr, mTorr, mbar and Pa)
- CE certified
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Inficon – VSA100A
Add to cartAdvantages
- Reliable and budget-priced vacuum switch
- High life time
- Rugged design
- Easy to integrate
- IP 44 protection
Typical applications
- Control of load lock chambers
- Safety shutdown of vacuum systemselastic diaphragm
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Inficon – VSA200
Add to cartAdvantages
- Corrosion resistant all stainless steel design
- Robust design, cleanroom compliant
- Easy installation with setpoints factory preset or field-adjustable
Typical Applications
- Atmospheric pressure detection for all vacuum applications
- Pressure interlock (power supplies, gas supplies, pumps, valves, actuators, etc.)
- Vacuum to high vacuum
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Inficon – VSC150A
Add to cartAdvantages
- High switching accuracy (± 0.1 mbar)
- Stable long term operating characteristics
- Rugged, corrosion protected design
Typical Applications
- Pressure switch or differential pressure switch to control valves, pumps, power supplies
- Load lock chambers
- Process chambers
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Inficon – VSD200
Add to cartAdvantages
- Corrosion resistant all stainless steel design
- Robust design, cleanroom compliant
- Easy installation with setpoints factory preset or field-adjustable
Typical Applications
- Atmospheric pressure detection for all vacuum applications
- Pressure interlock (power supplies, gas supplies, pumps, valves, actuators, etc.)
- Vacuum to high vacuum
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Inficon- TPG36x
Add to cartAs multifunctional controllers for process measurement, control and data logging, the TPG361 and TPG362 active pressure gauge controllers are designed to work seamlessly with a wide range of active compact pressure gauges. They efficiently manage and log data across a comprehensive pressure range from 10-10Â to 1500 mbar (10-10Â to 1125 Torr).
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OAI 308 UV Meter
$3,500.00Add to cartMeter:
• RoHS2 and CE Compliant
• Detachable single or dual wavelength probes
• Auto ranging, digital display
• Light intensity measured in milliwatts/cm2
• Accuracy is traceable to NIST
• High speed port available for data logging
• Optional data logging software -
OAI 656 UV Meter
$3,500.00Add to cartMeter:
• Use with Contact/Proximity Aligners
• Extremely accurate and reliable
• Easily download measurements
• Range of up to 2,000 mW/cm2
• Memory up to 400 measurements
• ROHS2 and CE compliantProbes:
Probe wavelengths (nm)
220, 248, 254, 260, 310, 325, 365, 380, 400, 420, 436 and 540
Multi-layer absorption
dielectric filters
