Tag: Advanced Temperature-Compensated Technology
Advanced Temperature-Compensated Technology
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Inficon – SKY CDG025D-X3
Add to cartBenefits
- Full scale ranges from 100 mTorr … 1000 Torr
- Fast stability after power on
- Fast recovery from atmospheric pressure
- Corrosion resistant ceramic sensor
- Excellent long term signal stability
- Temperature compensated
- Sensor double protected from contamination
- One pushbutton zero function
- Wide range power supply
- 2 setpoints
- RS232 interface
- Clean room compliant
Typical applications
- Semiconductor manufacturing equipment for Etch, CVD, PVD, ALD
- Data storage and display manufacturing equipment
- Industrial vacuum equipment
- General high accuracy pressure measurement