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Tag: ATM sensor

ATM sensor

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  • Inficon – PPG570

    Advantages

    • Gas type independent above 2 mbar – allows safe venting with any gas mixture
    • High accuracy and reproducibility at atmosphere – for reliable, fast atmospheric pressure detection
    •  Atmospheric ambient pressure measurement
    • Up to 3 solid state relays
    • Versatile of mounting orientation – provides engineering freedom in tool design
    •  Selectable analog output signal for easy system integration
    • Digital interfaces RS232/ RS485
    • Able to direct drop in replace MKS901P “MicroPirani™ – and Piezo Loadlock Vacuum Pressure Transducer”.
    • Compliance & standards: CE, EN, UL, CSA, RoHS

    Typical applications

    • Semiconductor load-lock applications
    • Use in Analytical equipment/ mass sepctrometers
    • Physical vapor deposition
    • Physical vapor deposition
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