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  Inficon – IM540

  Advantages

  • Supports the operation of the IE414 (Bayard-Alpert) and the IE514 (extractor) hot cathode ionization gauges
  • Two active gauges from the PSG5xx (Pirani), PCG55x (Pirani-Capacitance diaphragm) and CDG (Capacitance diaphragm) active gauge lines can be connected and operated
  • Simple operation with menu guided display for parameter, sensor or general settings
  • Built-in RS232 communication interface, optional PROFIBUS DP interface board (IF 540 P)
  • Two set points (optional 7) with adjustable hysteresis
  • High resolution – 16 bit A/D converter
  • 2 programmable 0 to 10 V chart recorder outputs

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  Inficon – VSA100A

  Advantages

  • Reliable and budget-priced vacuum switch
  • High life time
  • Rugged design
  • Easy to integrate
  • IP 44 protection

  Typical applications

  • Control of load lock chambers
  • Safety shutdown of vacuum systemselastic diaphragm

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