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  Inficon – BAG302

  Advantages

  • Wide measurement range from 1.3 × 10^-9 to 6.7×10^-2 mbar(1 × 10^-9 to 5 × 10^-2 Torr)
  • Two standard long-life yttrium oxide coated iridium filaments
  • All-in-One active gauge with built-in display, set-point, analog output and standard integrated RS485 digital interface
  • Bright digital OLED display with keypad for simple setup, operation and programming
  • User programmable set point relay
  • User programmable display units in mbar, Torr or Pa
  • User selectable Auto-ranging of emission current
  • Mechanical strength and ruggedness
  • Choice of various flange options
  • Easy to exchange sensing element
  • Compliance & standards: CE, RoHS
  • Direct drop in replaces Granville-Phillips^® 354 Micro-Ion^® Module – identical control functions including softwarecommands (RS485) (Granville-Phillips^® and Micro-Ion^® are registered trademarks of MKS Instruments, Andover, MA)

  Typical applications

  • Pressure measurement in semiconductor process and transfer chambers
  • Industrial coating
  • General vacuum measurement and control in the low to ultra high vacuum range

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