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Tag: Convection Enhanced Pirani

Convection Enhanced Pirani

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  • Inficon – BCG450

    Advantages

    • BCG450 saves cost and tool space and reduces the complexity of vacuum measurement installation and setup
    • Gas-type-independent pressure measurement above 10 Torr provides more reliable loadlock control for any gas mixture
    • Pirani interlock protects the hot filament from premature burnout
    • Automatic high vacuum Pirani adjustment reduces operator interventions
    • Differential pressure measurement at atmosphere eliminates uncertainty related to atmospheric pressure changes
    • Easy-to-exchange sensing element with on-board calibration data guarantees reproducibility
    • Optional graphic display and Fieldbus interfaces available
    • RoHS compliance

    Typical applications

    • Pressure measurement in Semiconductor process, transfer and loadlock chambers
    • Industrial coating
    • General vacuum measurement and control on systems in the low to ultra high vacuum range
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