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  CIQTEK DB500 Focused Ion Beam FESEM Microscope

  • Electron Beam System
  Gun type: High brightness Schottky Plus Field Emission Electron Gun
  Resolution: 1.2 nm@15 kV
  Acceleration Voltage 20 V ~ 30 kV
  • Ion Beam System
  Gun type: Liquid gallium ion source Resolution: 3 nm@30 kV
  Acceleration Voltage 500 V ~ 30 kV
  • Camera: Triple Optical navigation + sample chamber monitoring x2.
  • Stage Type: Eucentric stage
  • Stage Range: X=110 mm Y=110 mm / T: -10° ~+70°, Z=65 mm R: 360°

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