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  Inficon – Trigon BCG552

  Advantages

  • 3 + 1 sensing elements for extremely wide measurement range, cost reduction & space savings
  • 2 filaments for Bayard-Alpert system
  • Gas type independent pressure measurement above 10 Torr provides more reliable load lock control for any gas mixtures
  • Differential pressure measurement eliminates uncertainty related to atmospheric pressure changes
  • Automatic high vacuum Pirani adjustment reduces operator interventions
  • Galvanic isolated electronics to avoid electric stray current
  • Sliding emission mode to avoid pressure jumps and freeze when switching the emission stream
  • Set point relays
  • Bright & big OLED display (90° rotatable) with user interface
  • Analog output, RS232C serial interface, EtherCAT®
  • Usable in conjunction with VGC50x Controller series
  • Backwards compatible to TripleGauge® BCG450
  • RoHS compliance

  Typical applications

  • Pressure measurement in Semiconductor processes, transfer and loadlock chambers
  • Industrial coating
  • General vacuum measurement and control on systems in the low to ultra high vacuum range

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