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  Model 2000

  $48,000.00

  Model 2000 – Flood or Optical Edge Exposure System

  • Handles wafer sizes up to 8 inches
  • Windows based graphic user interface
  • Cassette-to-cassette robotic handling
  • Stores and logs process data
  • Remote diagnostics feature
  • High efficiency automated production system available with near, mid, and deep UV exposure
  • Highly stable and precise Intensity Controlling Power Supply
  • Optional UV LED upgrade
  • Optional SECS/GEM upgrade

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  Model 2012

  $56,700.00

  Model 2012 – 300mm Optical Edge or Flood Exposure System

  • Handles 200 or 300mm wafers (8” -12”)
  • Has automated foup loading or cassette to cassette handling
  • Up to 8kw Collimated Beam Light Source
  • Bar code reader and remote diagnostic
  • Semi safety compliant
  • Windows graphic user interface
  • Remote diagnostics

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