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Tag: gas analysis

gas analysis

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  • Qulee Reactive Gas Monitor

    • Mass Range: 1 to 200 amu
    • Resolution: M/ΔM = 1M (10% peak height)
    • Sensitivity: 1×10⁻³ A/Pa
    • Minimum Detectable Partial Pressure: 1×10⁻¹⁰ Pa
    • Ion Source: Closed ion source with magnetic field
    • Emission Current: 10 μA
    • Bakeout Temperature: Maximum 120°C
    • Pressure Range: 1×10⁻⁶ to 13 kPa
    • Pumping System: Turbo molecular pump (67 L/s for N₂)
    • Power Supply: AC 100V, 15A
    • Weight: 57 kg (pumping system), 38 kg (controller)
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