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  Inficon – Augent OPG550

  Advantages

  • High speed leak detection allows chamber leak test
  • Increase of productivity and yield
  • Long life time, no filament burns, air inrush protection
  • Withstand process chemistry
  • Smart algorithm for easy integration
  • Compact design and small footprint
  • Reliable and fast start up

  Typical Applications

  • Chamber leak check, faster RoR (rate of rise) test
  • Leak check to find internal leaks from gas supply lines
  • Real time end point control
  • Gas type and concentrations control

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