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  Inficon – IE414, IE514

  Advantages

  • High accuracy of the measurements due to individually calibrated sensing system
  • Exchangeable cathode
  • Extreme high temperature bake-out up to 400 °C

  IE414

  • Bayard-Alpert sensing principle
  • Measurement range to 2×10^-11 mbar
  • Modulation of the cathode emission current (in combination with the IM540 vacuum gauge controller)

  IE514

  • Extractor sensing principle
  • Lowest measurement limit, down to 2×10^-12 mbar
  • Significant reduction of X-ray and ion desorption effects

  Typical applications

  • Scientific and R&D applications requiring precise vacuum measurement in the ultra-high vacuum range and high temperature bake-out

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