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Tag: High Vacuum Gauge

High Vacuum Gauge

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  • Inficon – HPG400

    Advantages

    • HPG400 saves cost and tool space and reduces the complexity of vacuum system installation and setup
    • The high pressure hot ion gauge delivers accurate, reliable pressure measurements from 1×10-5 … 1 mbar for improved process control
    • User selectable hot ion emission activation between 5×10-2 and 1 mbar
    • Pirani interlock protects the hot filament from premature burnout
    • Optional graphic display and Fieldbus interfaces available
    • Automatic high vacuum Pirani adjustment reduces operator interventions
    • RoHS compliance

    Typical applications

    • Sputter applications in semiconductor manufacturing, electronics and media industry
    • Industrial coating
    • General vacuum measurement and control in the low to high vacuum range
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