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  Inficon – BAG055

  Advantages

  • Long standing, reliable and proven gauge head design
  • Drop-in replacement thanks to its compact size, large choice of connection flanges and fittings
  • Dual yttrium oxide coated iridium filament cathode assembly
  • Electron bombardment (EB) degassing

  Typical applications

  • Industrial or R&D applications requiring precise vacuum measurement in the high vacuum range

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  Inficon – BAG05x

  Advantages

  • Long standing, reliable and proven gauge head design
  • Drop-in replacement for most nude hot ion gauge heads
  • Wide range of emission currents (100 μA to 10 mA)
  • Available with single/dual yttrium oxide coated iridium and dual tungsten filament cathode assemblies
  • Degas: all models can be degassed using in electron bombardment (EB), BAG051, BAG052 and BAG053 can also be degassed using resistive degas (I²R)

  Typical applications

  • Industrial or R&D applications requiring precise vacuum measurement in the high/ultra-high vacuum range and high temperature bake-out

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  Inficon – BAG402

  Advantages

  • Measurement range from 5×10^-10 mbar to 2.7×10^-2 mbar (3.75×10^-10 Torr to 5×10^-2 Torr)
  • Excellent repeatability in the process pressure range from 10^-8 … 10^-2 mbar of 5%
  • Overpressure detection protects the filament from premature burnout
  • Two long-life yttrium oxide coated iridium filaments
  • Automatic emission current selection reduces control complexity
  • Easy to exchange sensing element with on-board calibration data guarantees high reproducibility
  • RoHS compliance

  Typical applications

  • Pressure measurement in semiconductor process and transfer chambers
  • Industrial coating
  • General vacuum measurement and control in the low to ultra high vacuum range

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  Inficon – BCG450

  Advantages

  • BCG450 saves cost and tool space and reduces the complexity of vacuum measurement installation and setup
  • Gas-type-independent pressure measurement above 10 Torr provides more reliable loadlock control for any gas mixture
  • Pirani interlock protects the hot filament from premature burnout
  • Automatic high vacuum Pirani adjustment reduces operator interventions
  • Differential pressure measurement at atmosphere eliminates uncertainty related to atmospheric pressure changes
  • Easy-to-exchange sensing element with on-board calibration data guarantees reproducibility
  • Optional graphic display and Fieldbus interfaces available
  • RoHS compliance

  Typical applications

  • Pressure measurement in Semiconductor process, transfer and loadlock chambers
  • Industrial coating
  • General vacuum measurement and control on systems in the low to ultra high vacuum range

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  Inficon – BPG400

  Advantages

  • Extremely wide measurement range from 5×10^-10 mbar to atmosphere (3.8×10^-10 Torr to atmosphere)
  • Excellent repeatability in the process pressure range from 10^-8 … 10^-2 mbar of 5%
  • The Pirani interlock protects the Bayard-Alpert system from premature filament burnout and excess contamination from high pressure operation
  • Long-life yttrium oxide coated iridium filament
  • Optional graphic display and Fieldbus interfaces available
  • Automatic high vacuum Pirani adjustment reduces operator interventions
  • RoHS compliance
  • General vacuum measurement and control in the low to ultra high vacuum range

  Typical applications

  • Pressure measurement in semiconductor process and transfer chambers
  • Industrial coating
  • General vacuum measurement and control in the low to ultra high vacuum range

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  Inficon – BPG402-Sx

  Advantages

  • Extremely wide measurement range from 5×10^-10 mbar to atmosphere (3.8×10^-10 Torr to atmosphere)
  • Excellent repeatability in the process pressure range from 10^-8 … 10^-2 mbar of 5%
  • Pirani interlock protects the filament from premature burnout
  • Two long-life yttrium oxide coated iridium filaments
  • Optional graphic display and Fieldbus interfaces available
  • Automatic high vacuum Pirani adjustment reduces operator interventions
  • Easy to exchange sensing element with on-board calibration data guarantees high reproducibility
  • RoHS compliance

  Typical applications

  • Pressure measurement in semiconductor process and transfer chambers
  • Industrial coating
  • General vacuum measurement and control in the low to ultra high vacuum range

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  Inficon – HPG400

  Advantages

  • HPG400 saves cost and tool space and reduces the complexity of vacuum system installation and setup
  • The high pressure hot ion gauge delivers accurate, reliable pressure measurements from 1×10^-5 … 1 mbar for improved process control
  • User selectable hot ion emission activation between 5×10^-2 and 1 mbar
  • Pirani interlock protects the hot filament from premature burnout
  • Optional graphic display and Fieldbus interfaces available
  • Automatic high vacuum Pirani adjustment reduces operator interventions
  • RoHS compliance

  Typical applications

  • Sputter applications in semiconductor manufacturing, electronics and media industry
  • Industrial coating
  • General vacuum measurement and control in the low to high vacuum range

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  Inficon – IE414, IE514

  Advantages

  • High accuracy of the measurements due to individually calibrated sensing system
  • Exchangeable cathode
  • Extreme high temperature bake-out up to 400 °C

  IE414

  • Bayard-Alpert sensing principle
  • Measurement range to 2×10^-11 mbar
  • Modulation of the cathode emission current (in combination with the IM540 vacuum gauge controller)

  IE514

  • Extractor sensing principle
  • Lowest measurement limit, down to 2×10^-12 mbar
  • Significant reduction of X-ray and ion desorption effects

  Typical applications

  • Scientific and R&D applications requiring precise vacuum measurement in the ultra-high vacuum range and high temperature bake-out

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  Inficon – PBR 260

  Advantages

  • PBR 260 Pirani/Bayard-Alpert hot cathode combination gauge offers general vacuum measurement and control in the low to ultrahigh vacuum range with just one compact measuring device
  • Flange size: DN 25 ISO-KF, DN 40 CF-R, DN 40 ISO-KF
  • Maximum pressure applies to inert gases and temperatures of less then 55°C
  • Highly accurate, excellent repeatability in the process range 10^-8 … 10^-2 mbar
  • Bayard-Alpert sensor ON/OFF automatically controlled by Pirani sensor
  • Long-life yttrium oxide coated iridium filament
  • RoHS compliance

  Drop in compatible to other manufacturers PBR 260 Pirani/Bayard-Alpert hot cathode gauges

  • Part number IGG27000 matches PT R27 000
  • Part number IGG27001 matches PT R27 001
  • Part number IGG27002 matches PT R27 00

  Typical applications

  • General pressure measurement in semiconductor and analytical process environment
  • Optical and other industrial coating processes

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  Inficon – Trigon BCG552

  Advantages

  • 3 + 1 sensing elements for extremely wide measurement range, cost reduction & space savings
  • 2 filaments for Bayard-Alpert system
  • Gas type independent pressure measurement above 10 Torr provides more reliable load lock control for any gas mixtures
  • Differential pressure measurement eliminates uncertainty related to atmospheric pressure changes
  • Automatic high vacuum Pirani adjustment reduces operator interventions
  • Galvanic isolated electronics to avoid electric stray current
  • Sliding emission mode to avoid pressure jumps and freeze when switching the emission stream
  • Set point relays
  • Bright & big OLED display (90° rotatable) with user interface
  • Analog output, RS232C serial interface, EtherCAT®
  • Usable in conjunction with VGC50x Controller series
  • Backwards compatible to TripleGauge® BCG450
  • RoHS compliance

  Typical applications

  • Pressure measurement in Semiconductor processes, transfer and loadlock chambers
  • Industrial coating
  • General vacuum measurement and control on systems in the low to ultra high vacuum range

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  Inficon – Trigon BPG552

  Advantages

  • Dual Gauge (2 sensing elements) for a wide measurement range, cost reduction & space savings
  • 2 filaments for Bayard-Alpert system
  • Pirani interlock protection to avoid premature filament burnout
  • Automatic high vacuum Pirani adjustment reduces operator interventions
  • Galvanic isolated electronics to avoid electric stray current
  • Sliding emission mode to avoid pressure jumps and freeze when switching the emission stream
  • Extended bakeability due to removable calibration data chips
  • Set point relays
  • Bright & big OLED display (90° rotatable) with user interface
  • Analog output, RS232C serial interface, EtherCAT®
  • Usable in conjunction with VGC50x Controller series
  • Backwards compatible to BPG402
  • RoHS compliance

  Typical applications

  • Pressure measurement in Semiconductor processes
  • Industrial coating
  • General vacuum measurement and control on systems in the low to ultra high vacuum range

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