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Tag: Medium to Ultra High Vacuum Single Gauge

Medium to Ultra High Vacuum Single Gauge

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  • Inficon – Trigon BAG552

    Advantages

    • Pure Bayard-Alpert measuring system for a wide UHV & HV measurement range
    • 2 filaments for Bayard-Alpert system
    • Galvanic isolated electronics to avoid electric stray current
    • Sliding emission mode to avoid pressure jumps and freeze when switching the emission stream
    • Extended bakeability due to removable calibration data chips
    • Set point relays
    • Bright & big OLED display (90° rotateable) with user interface
    • Analog output, RS232C serial interface, EtherCAT®
    • Usable in conjunction with VGC50x Controller series
    • RoHS compliance

    Typical applications

    • Pressure measurement in Semiconductor processes
    • Industrial coating
    • General vacuum measurement and control on systems in the high to ultra high vacuum range
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