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Tag: MEMS Piezo Sensor

MEMS Piezo Sensor

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  • Inficon – PPG550

    Advantages

    • Gas type independent above 2 mbar – allows safe venting with any gas mixture
    • High accuracy and reproducibility at atmosphere – for reliable, fast atmospheric pressure detection
    • Versatile of mounting orientation – provides engineering freedom in tool design
    •  Selectable analog output signal for easy system integration
    •  Digital interfaces RS232/ RS485
    • Compliance & standards: CE, EN, UL, CSA, RoHS
    • Able to direct drop in replace MKS910 “DualTrans™ MicroPirani™ – Absolute Piezo Vacuum Pressure Transducers” as well as MKS925  “Micro Pirani™ Vacuum Pressure Transducers”. DualTrans™ MicroPirani™ are registered trademarks of MKS Instruments, Andover, MA
    • Compliance & standards: CE, EN, UL, CSA, RoHS

    Typical applications

    • Use in Analytical equipment/ mass spectrometers
    • Physical vapor deposition
    • Fore-line measurement
    •  Gas-backfilling
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