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Tag: Pressure Measurement and Control

Pressure Measurement and Control

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  • Inficon – SKY CDG100D

    Advantages

    • Lower CoO (cost of ownership), 50% faster warm up, energy efficient low power consumption
    • Easy integration, wide variety of full scales, flanges and interfaces, standard with two set points
    • Easy one push button or remote signal zero command, zero offset adjustable
    • Diagnostic port for quick service and maintenance
    • Two year warranty, longer life time with advanced heating concept and gauge protection
    • No long term recalibration due to excellent signal stability and repeatability, even in harsh plasma applications
    • Compliance & standards: CE, EN, UL, SEMI, RoHS

    Typical applications

    • Etch, CVD, PVD and other semiconductor production processes
    • Chemical and corrosive high temperature processes
    • General thin film and vacuum processes requiring gauge protection
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