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  Inficon – PPG550

  Advantages

  • Gas type independent above 2 mbar – allows safe venting with any gas mixture
  • High accuracy and reproducibility at atmosphere – for reliable, fast atmospheric pressure detection
  • Versatile of mounting orientation – provides engineering freedom in tool design
  •  Selectable analog output signal for easy system integration
  •  Digital interfaces RS232/ RS485
  • Compliance & standards: CE, EN, UL, CSA, RoHS
  • Able to direct drop in replace MKS910 “DualTrans™ MicroPirani™ – Absolute Piezo Vacuum Pressure Transducers” as well as MKS925  “Micro Pirani™ Vacuum Pressure Transducers”. DualTrans™ MicroPirani™ are registered trademarks of MKS Instruments, Andover, MA
  • Compliance & standards: CE, EN, UL, CSA, RoHS

  Typical applications

  • Use in Analytical equipment/ mass spectrometers
  • Physical vapor deposition
  • Fore-line measurement
  •  Gas-backfilling

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  Inficon – PPG570

  Advantages

  • Gas type independent above 2 mbar – allows safe venting with any gas mixture
  • High accuracy and reproducibility at atmosphere – for reliable, fast atmospheric pressure detection
  •  Atmospheric ambient pressure measurement
  • Up to 3 solid state relays
  • Versatile of mounting orientation – provides engineering freedom in tool design
  •  Selectable analog output signal for easy system integration
  • Digital interfaces RS232/ RS485
  • Able to direct drop in replace MKS901P “MicroPirani™ – and Piezo Loadlock Vacuum Pressure Transducer”.
  • Compliance & standards: CE, EN, UL, CSA, RoHS

  Typical applications

  • Semiconductor load-lock applications
  • Use in Analytical equipment/ mass sepctrometers
  • Physical vapor deposition
  • Physical vapor deposition

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