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Tag: sputtering

sputtering

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  • VPC-061 Vacuum Coater

    VPC-061 Vacuum Coater

    • Ultimate Pressure: 1.3 × 10⁻³ Pa, 6.6 × 10⁻⁴ Pa (LN₂)
    • Evacuation Time: 4.0 × 10⁻³ Pa/20min, 1.3 × 10⁻³ Pa/20min (LN₂)
    • Bell Jar Size: Glass belljar (dia. 150mm × 200mm(H))
    • Substrate Electrode Distance: Max 100mm
    • Evaporation Electrode Structure: 1 point
    • Recommended Substrate Size (Maximum Substrate Size): sq.25mm (sq.50mm)
    • Evaporation Power Supply: 0–10V 50A (Max)
    • Main Pump: Oil diffusion pump (air cooling) 50 L/sec
    • Backing Pump: Oil rotary vacuum pump 20 L/min
    • Liquid Nitrogen Trap: Equipped
    • Automatic Leak Valve: –
    • Control System: Manual control
    • Weight (Body): 38kg
    • Weight (Power Supply): 40kg
    • Overall Dimensions (Body): 434mm(W) × 422mm(D) × 673mm(H)
    • Overall Dimensions (Power Supply): 480mm(W) × 435.3mm(D) × 149mm(H)
    • Power Requirement (Body): Single phase, 50/60Hz, 100V, 0.63kVA
    • Power Supply: Single phase, 50/60Hz, 100V, 0.63kVA
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