Tag: sputtering
sputtering
Showing the single result
-
VPC-061 Vacuum Coater
Add to cartVPC-061 Vacuum Coater
- Ultimate Pressure: 1.3 × 10⁻³ Pa, 6.6 × 10⁻⁴ Pa (LN₂)
- Evacuation Time: 4.0 × 10⁻³ Pa/20min, 1.3 × 10⁻³ Pa/20min (LN₂)
- Bell Jar Size: Glass belljar (dia. 150mm × 200mm(H))
- Substrate Electrode Distance: Max 100mm
- Evaporation Electrode Structure: 1 point
- Recommended Substrate Size (Maximum Substrate Size): sq.25mm (sq.50mm)
- Evaporation Power Supply: 0–10V 50A (Max)
- Main Pump: Oil diffusion pump (air cooling) 50 L/sec
- Backing Pump: Oil rotary vacuum pump 20 L/min
- Liquid Nitrogen Trap: Equipped
- Automatic Leak Valve: –
- Control System: Manual control
- Weight (Body): 38kg
- Weight (Power Supply): 40kg
- Overall Dimensions (Body): 434mm(W) × 422mm(D) × 673mm(H)
- Overall Dimensions (Power Supply): 480mm(W) × 435.3mm(D) × 149mm(H)
- Power Requirement (Body): Single phase, 50/60Hz, 100V, 0.63kVA
- Power Supply: Single phase, 50/60Hz, 100V, 0.63kVA