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  Inficon – SK CDG025D

  Advantages

  • Full scale ranges from 100 mTorr … 1000 Torr
  • Fast stability after power on
  • Fast recovery from atmospheric pressure
  • Corrosion resistant ceramic sensor
  • Excellent long term signal stability
  • Temperature compensated
  • Sensor protected from contamination
  • One pushbutton zero function
  • Wide range power supply

  Typical Applications

  • Semiconductor manufacturing equipment for Etch, CVD, PVD, ALD
  • Data storage and display manufacturing equipment
  • Industrial vacuum equipment
  • General high accuracy pressure measurement

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