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Tag: UV-Litho-S

UV-Litho-S

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  • UV-Litho-S

    $3,600.00
    • Minimum Line width:    1.0 um
    • Minimum Feature size: 0.8 um
    • Writing Speed: 1,200 mm2/min @ 1.0 um
    • 3,000mm2/min @  5.0 um
    • Light source: LD 405nm / 375nm
    • XY distance:  55mm
    • Overlay Accuracy: 200nm
    • Minimum sample size: 1 inch x 1 inch
    • Maximum sample size: 8 inch x 8 inch
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