Tag: UV-Litho-S
UV-Litho-S
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UV-Litho-S
$3,600.00Add to cart- Minimum Line width:Â Â Â 1.0 um
- Minimum Feature size: 0.8 um
- Writing Speed: 1,200 mm2/min @ 1.0 um
- 3,000mm2/min @Â 5.0 um
- Light source: LD 405nm / 375nm
- XY distance:Â 55mm
- Overlay Accuracy: 200nm
- Minimum sample size: 1 inch x 1 inch
- Maximum sample size: 8 inch x 8 inch