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Tag: UV-Litho-Y

UV-Litho-Y

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  • UV-Litho-Y

    $6,400.00
    • Minimum Line width:     1.5um
    • Minimum Feature size: 1.2um
    • Writing Speed: 10 mm2/min @ 1.5um
    • Light source: LED 405nm / 385nm
    • XY distance:  55mm
    • Overlay Accuracy: 500nm
    • Minimum sample size: 3mm x 3mm
    • Maximum sample size: 50mm x 50 mm
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