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  UV Litho S+

  $5,622.00

  • Minimum Line width:    0.5 um
  • Minimum Feature size: 0.35 um
  • Writing Speed: 300 mm²/min @ 0.5 um
  • 3,000mm2/min @ 5.0 um
  • Light source: LD 405nm / 375nm
  • XY distance:  55mm
  • Overlay Accuracy: 200nm
  • Minimum sample size: 1 inch x 1 inch
  • Maximum sample size: 8 inch x 8 inch

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