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Inficon – BAG05x
$0.00
Advantages
- Long standing, reliable and proven gauge head design
- Drop-in replacement for most nude hot ion gauge heads
- Wide range of emission currents (100 μA to 10 mA)
- Available with single/dual yttrium oxide coated iridium and dual tungsten filament cathode assemblies
- Degas: all models can be degassed using in electron bombardment (EB), BAG051, BAG052 and BAG053 can also be degassed using resistive degas (I2R)
Typical applications
- Industrial or R&D applications requiring precise vacuum measurement in the high/ultra-high vacuum range and high temperature bake-out
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Inficon – Augent OPG550
$0.00Add to cartAdvantages
- High speed leak detection allows chamber leak test
- Increase of productivity and yield
- Long life time, no filament burns, air inrush protection
- Withstand process chemistry
- Smart algorithm for easy integration
- Compact design and small footprint
- Reliable and fast start up
Typical Applications
- Chamber leak check, faster RoR (rate of rise) test
- Leak check to find internal leaks from gas supply lines
- Real time end point control
- Gas type and concentrations control
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Inficon – PGE300
$0.00Add to cartAdvantages
- Convection Enhanced Pirani Technology for wide measurement range and higher accuracy near atmosphere
- All-in-One active gauge with built-in display, 1 set point and 3 selectable analog output signals
- Bright digital LED display features a user friendly for calibration and operation
- 3 optional analog output signals (user selectable)
- Factory pre-set analog output signal or selectable via user interface
- Factory pre-set display units or selectable via user interface
- User programmable set point relays
- Gold plated tungsten filament
- Mechanical strength, highly robust and less susceptible to mechanical shock and vibration
- Choice of flange options
- Compliance & standards: CE, RoHS
- Direct drop in replaces most Granville-Phillips® Mini-Convectron® modules (GP275) and ideal device forupgrading your installed thermocouple gauges (Granville-Phillips® and Mini-Convectron® are registered trademarks of MKS Instruments, Andover, MA)
Typical applications
- Fore vacuum pressure measurement
- General vacuum measurement and control from low to the high vacuum range
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Inficon – Gemini MxG5xx
$0.00Add to cartAdvantages
- Long lifetime in harsh environments
- Low magnetic stray field
- Reliable fast ignition
- Fastest maintenance – replaceable insert
- Compact size – easy to integrate
- Corrosion proof feed-through & sensor element
- Selectable measuring current
- 2 relay setpoints (in conjunction with MxG55x PROFINET and EtherCAT)
- PROFINET, EtherCAT and RS232/ RS485 digital interace
Typical applications
- Base pressure monitoring and control, from atmosphere to high vacuum in evaporation and sputter coating applications.
- General vacuum measurement – industrial furnaces, architectural glass, semiconductor, Refrigeration/ air conditioning and production laboratory`s
- Analytical and R&D applications – mass spectrometry, electron microscopes, ophthalmic, optical, medical and high energy physics.
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Inficon – PSG50x
$0.00Add to cartAdvantages
- Easy push button ATM and HV adjustment
- Space saving rugged design
- Aluminum housing
- Mounts in any orientation
- Stainless steel measuring cell with metal-sealed feedthrough
- Logarithmic signal output for easy integration
- 10 bar absolute overpressure with threaded connections
- 250 °C bakeable version
- Nickel filament option for corrosive applications
- Ceramic feedthrough for extremely corrosive applications (PSG510 & PSG512)
- Optional setpoints
- RoHS compliance
Typical applications
- Controlling high vacuum ionization gauges
- Fore vacuum pressure monitoring
- Safety circuits in vacuum systems
- General vacuum measurement and control in the fine and rough vacuum range
-
Inficon – BCG450
$0.00Add to cartAdvantages
- BCG450 saves cost and tool space and reduces the complexity of vacuum measurement installation and setup
- Gas-type-independent pressure measurement above 10 Torr provides more reliable loadlock control for any gas mixture
- Pirani interlock protects the hot filament from premature burnout
- Automatic high vacuum Pirani adjustment reduces operator interventions
- Differential pressure measurement at atmosphere eliminates uncertainty related to atmospheric pressure changes
- Easy-to-exchange sensing element with on-board calibration data guarantees reproducibility
- Optional graphic display and Fieldbus interfaces available
- RoHS compliance
Typical applications
- Pressure measurement in Semiconductor process, transfer and loadlock chambers
- Industrial coating
- General vacuum measurement and control on systems in the low to ultra high vacuum range
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