Inficon – BPG402-Sx

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  Inficon – BAG302

  Advantages

  • Wide measurement range from 1.3 × 10^-9 to 6.7×10^-2 mbar(1 × 10^-9 to 5 × 10^-2 Torr)
  • Two standard long-life yttrium oxide coated iridium filaments
  • All-in-One active gauge with built-in display, set-point, analog output and standard integrated RS485 digital interface
  • Bright digital OLED display with keypad for simple setup, operation and programming
  • User programmable set point relay
  • User programmable display units in mbar, Torr or Pa
  • User selectable Auto-ranging of emission current
  • Mechanical strength and ruggedness
  • Choice of various flange options
  • Easy to exchange sensing element
  • Compliance & standards: CE, RoHS
  • Direct drop in replaces Granville-Phillips^® 354 Micro-Ion^® Module – identical control functions including softwarecommands (RS485) (Granville-Phillips^® and Micro-Ion^® are registered trademarks of MKS Instruments, Andover, MA)

  Typical applications

  • Pressure measurement in semiconductor process and transfer chambers
  • Industrial coating
  • General vacuum measurement and control in the low to ultra high vacuum range

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  Inficon – Porter CDG020D

  Benefits

  • Excellent span stability – gas type independent
  • Alumina sensor
  • Compact, smallest size in it’s class
  • Easy integration, any mounting orientation
  • Digital signal processing
  • Maintenance free

  Typical applications

  • Vacuum coating
  • Vacuum monitoring
  • Sterilization
  • Food & packaging
  • Vacuum oven, puller
  • Analytical
  • Chemical vacuum processes

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  Inficon – PSG50x

  Advantages

  • Easy push button ATM and HV adjustment
  • Space saving rugged design
  • Aluminum housing
  • Mounts in any orientation
  • Stainless steel measuring cell with metal-sealed feedthrough
  • Logarithmic signal output for easy integration
  • 10 bar absolute overpressure with threaded connections
  • 250 °C bakeable version
  • Nickel filament option for corrosive applications
  • Ceramic feedthrough for extremely corrosive applications (PSG510 & PSG512)
  • Optional setpoints
  • RoHS compliance

  Typical applications

  • Controlling high vacuum ionization gauges
  • Fore vacuum pressure monitoring
  • Safety circuits in vacuum systems
  • General vacuum measurement and control in the fine and rough vacuum range

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  Inficon – IRC081

  • Operating and display solution for accurate vacuum pressure measurement
  • User control on all IRG080 gauge parameters set
  • Simple manual operation with 5 potentiometers
  • User Interface connection via USB-B port to PC
  • PC Software in LabVIEW^TM
  • Data log and parameter log functionality
  • External port for status and vacuum interlock

   

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  Inficon – BCG450

  Advantages

  • BCG450 saves cost and tool space and reduces the complexity of vacuum measurement installation and setup
  • Gas-type-independent pressure measurement above 10 Torr provides more reliable loadlock control for any gas mixture
  • Pirani interlock protects the hot filament from premature burnout
  • Automatic high vacuum Pirani adjustment reduces operator interventions
  • Differential pressure measurement at atmosphere eliminates uncertainty related to atmospheric pressure changes
  • Easy-to-exchange sensing element with on-board calibration data guarantees reproducibility
  • Optional graphic display and Fieldbus interfaces available
  • RoHS compliance

  Typical applications

  • Pressure measurement in Semiconductor process, transfer and loadlock chambers
  • Industrial coating
  • General vacuum measurement and control on systems in the low to ultra high vacuum range

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