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Inficon – Edge CDG025D2
Advantages
- Easy integration, EtherCAT, wide variety of full scales and flanges, standard with two set points
- Easy one push button or remote signal zero command, zero offset adjustable
- Diagnostic port for quick service and maintenance
- Corrosion resistant ceramic sensor
- Excellent long term signal stability
- Temperature compensated
- Sensor protected from contamination
- Compliance & standards: CE, EN, UL, SEMI, RoHS
Typical applications
- Etch, PVD and other semiconductor production processes
- Data storage and display manufacturing equipment
- Industrial vacuum equipment
- General high accuracy pressure measurement
Related products
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Inficon – PGE500 RS485/ Analog
Add to cartAdvantages
- Convection Enhanced Pirani Technology for wide measurement range and higher accuracy near atmosphere
- All-in-One active gauge with built-in display, 2 set points, 4 analog output signals, and 2 digital interfaces
- Bright digital OLED display with keypad for simple setup, calibration and operation
- 4 optional analog output signals (3 user selectable, 1 Default)
- Factory pre-set analog output signal or selectable via keypad
- Factory pre-set display units or selectable via keypad
- User programmable set point relays (factory pre-set on request for volume orders)
- Gold plated tungsten filament
- Mechanical strength, highly robust and less susceptible to mechanical shock and vibration
- Choice of flange options
- Compliance & standards: CE, RoHS
- Direct drop in replaces most Granville-Phillips® Mini-Convectron® modules (GP275) (Granville-Phillips® and Mini-Convectron® are registered trademarks of MKS Instruments, Andover, MA)
Typical applications
- Fore vacuum pressure measurement
- General vacuum measurement and control form low to the high vacuum range
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Inficon – BPG402-Sx
Add to cartAdvantages
- Extremely wide measurement range from 5×10-10 mbar to atmosphere (3.8×10-10 Torr to atmosphere)
- Excellent repeatability in the process pressure range from 10-8 … 10-2 mbar of 5%
- Pirani interlock protects the filament from premature burnout
- Two long-life yttrium oxide coated iridium filaments
- Optional graphic display and Fieldbus interfaces available
- Automatic high vacuum Pirani adjustment reduces operator interventions
- Easy to exchange sensing element with on-board calibration data guarantees high reproducibility
- RoHS compliance
Typical applications
- Pressure measurement in semiconductor process and transfer chambers
- Industrial coating
- General vacuum measurement and control in the low to ultra high vacuum range
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Inficon – Trigon BCG552
Add to cartAdvantages
- 3 + 1 sensing elements for extremely wide measurement range, cost reduction & space savings
- 2 filaments for Bayard-Alpert system
- Gas type independent pressure measurement above 10 Torr provides more reliable load lock control for any gas mixtures
- Differential pressure measurement eliminates uncertainty related to atmospheric pressure changes
- Automatic high vacuum Pirani adjustment reduces operator interventions
- Galvanic isolated electronics to avoid electric stray current
- Sliding emission mode to avoid pressure jumps and freeze when switching the emission stream
- Set point relays
- Bright & big OLED display (90° rotatable) with user interface
- Analog output, RS232C serial interface, EtherCAT®
- Usable in conjunction with VGC50x Controller series
- Backwards compatible to TripleGauge® BCG450
- RoHS compliance
Typical applications
- Pressure measurement in Semiconductor processes, transfer and loadlock chambers
- Industrial coating
- General vacuum measurement and control on systems in the low to ultra high vacuum range
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Inficon – Porter CDG020D
Add to cartBenefits
- Excellent span stability – gas type independent
- Alumina sensor
- Compact, smallest size in it’s class
- Easy integration, any mounting orientation
- Digital signal processing
- Maintenance free
Typical applications
- Vacuum coating
- Vacuum monitoring
- Sterilization
- Food & packaging
- Vacuum oven, puller
- Analytical
- Chemical vacuum processes
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Inficon – PPG550
Add to cartAdvantages
- Gas type independent above 2 mbar – allows safe venting with any gas mixture
- High accuracy and reproducibility at atmosphere – for reliable, fast atmospheric pressure detection
- Versatile of mounting orientation – provides engineering freedom in tool design
- Selectable analog output signal for easy system integration
- Digital interfaces RS232/ RS485
- Compliance & standards: CE, EN, UL, CSA, RoHS
- Able to direct drop in replace MKS910 “DualTrans™ MicroPirani™ – Absolute Piezo Vacuum Pressure Transducers” as well as MKS925 “Micro Pirani™ Vacuum Pressure Transducers”. DualTrans™ MicroPirani™ are registered trademarks of MKS Instruments, Andover, MA
- Compliance & standards: CE, EN, UL, CSA, RoHS
Typical applications
- Use in Analytical equipment/ mass spectrometers
- Physical vapor deposition
- Fore-line measurement
- Gas-backfilling
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