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Inficon – Edge CDG025D2
Advantages
- Easy integration, EtherCAT, wide variety of full scales and flanges, standard with two set points
- Easy one push button or remote signal zero command, zero offset adjustable
- Diagnostic port for quick service and maintenance
- Corrosion resistant ceramic sensor
- Excellent long term signal stability
- Temperature compensated
- Sensor protected from contamination
- Compliance & standards: CE, EN, UL, SEMI, RoHS
Typical applications
- Etch, PVD and other semiconductor production processes
- Data storage and display manufacturing equipment
- Industrial vacuum equipment
- General high accuracy pressure measurement
Related products
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Inficon – PSG55x
Read moreAdvantages
- Available with Tungsten (PSG550) or Nickel (PSG552) filament or with a fully ceramic coated (PSG554) sensor unit for highly corrosive applications
- Optional display, setpoints and digital interfaces
- Latest EtherCAT protocol Standard ETG.5003.2080 S (R) V1.3.0
- Easy to exchange plug & play sensor element with on-board calibration data – guarantees high reproducibility and low cost of ownership
- Selectable output signal and various plug versions for easy integration
- Mounts in any orientation – provides engineering freedom in tool design
- Diagnostic port on all versions
- Compliance & standards: CE, EN, UL, CSA, RoHS
Typical applications
- Fore vacuum pressure measurement
- Safety circuits in vacuum systems
- General vacuum measurement and control from low to the high vacuum range
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Inficon – BPG400
Read moreAdvantages
- Extremely wide measurement range from 5×10-10 mbar to atmosphere (3.8×10-10 Torr to atmosphere)
- Excellent repeatability in the process pressure range from 10-8 … 10-2 mbar of 5%
- The Pirani interlock protects the Bayard-Alpert system from premature filament burnout and excess contamination from high pressure operation
- Long-life yttrium oxide coated iridium filament
- Optional graphic display and Fieldbus interfaces available
- Automatic high vacuum Pirani adjustment reduces operator interventions
- RoHS compliance
- General vacuum measurement and control in the low to ultra high vacuum range
Typical applications
- Pressure measurement in semiconductor process and transfer chambers
- Industrial coating
- General vacuum measurement and control in the low to ultra high vacuum range
-
Inficon – Trigon BAG552
Read moreAdvantages
- Pure Bayard-Alpert measuring system for a wide UHV & HV measurement range
- 2 filaments for Bayard-Alpert system
- Galvanic isolated electronics to avoid electric stray current
- Sliding emission mode to avoid pressure jumps and freeze when switching the emission stream
- Extended bakeability due to removable calibration data chips
- Set point relays
- Bright & big OLED display (90° rotateable) with user interface
- Analog output, RS232C serial interface, EtherCAT®
- Usable in conjunction with VGC50x Controller series
- RoHS compliance
Typical applications
- Pressure measurement in Semiconductor processes
- Industrial coating
- General vacuum measurement and control on systems in the high to ultra high vacuum range
-
Inficon – PSG50x
Read moreAdvantages
- Easy push button ATM and HV adjustment
- Space saving rugged design
- Aluminum housing
- Mounts in any orientation
- Stainless steel measuring cell with metal-sealed feedthrough
- Logarithmic signal output for easy integration
- 10 bar absolute overpressure with threaded connections
- 250 °C bakeable version
- Nickel filament option for corrosive applications
- Ceramic feedthrough for extremely corrosive applications (PSG510 & PSG512)
- Optional setpoints
- RoHS compliance
Typical applications
- Controlling high vacuum ionization gauges
- Fore vacuum pressure monitoring
- Safety circuits in vacuum systems
- General vacuum measurement and control in the fine and rough vacuum range
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Inficon – HPG400
Read moreAdvantages
- HPG400 saves cost and tool space and reduces the complexity of vacuum system installation and setup
- The high pressure hot ion gauge delivers accurate, reliable pressure measurements from 1×10-5 … 1 mbar for improved process control
- User selectable hot ion emission activation between 5×10-2 and 1 mbar
- Pirani interlock protects the hot filament from premature burnout
- Optional graphic display and Fieldbus interfaces available
- Automatic high vacuum Pirani adjustment reduces operator interventions
- RoHS compliance
Typical applications
- Sputter applications in semiconductor manufacturing, electronics and media industry
- Industrial coating
- General vacuum measurement and control in the low to high vacuum range
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