Inficon – IRC081

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  Inficon – HPG400

  Advantages

  • HPG400 saves cost and tool space and reduces the complexity of vacuum system installation and setup
  • The high pressure hot ion gauge delivers accurate, reliable pressure measurements from 1×10^-5 … 1 mbar for improved process control
  • User selectable hot ion emission activation between 5×10^-2 and 1 mbar
  • Pirani interlock protects the hot filament from premature burnout
  • Optional graphic display and Fieldbus interfaces available
  • Automatic high vacuum Pirani adjustment reduces operator interventions
  • RoHS compliance

  Typical applications

  • Sputter applications in semiconductor manufacturing, electronics and media industry
  • Industrial coating
  • General vacuum measurement and control in the low to high vacuum range

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  Inficon – PCG55x

  • Gas type independent above 10 mbar – allows safe venting with any gas mixture
  • High accuracy and reproducibility at atmosphere – for reliable, fast atmospheric pressure detection
  • Versatile of mounting orientation – provides engineering freedom in tool design
  • Available with Tungsten (PCG550) or Nickel (PCG552) filament or with a fully ceramic coated (PCG554) sensor unit for highly corrosive applications
  • Latest EtherCAT protocol Standard ETG.5003.2080 S (R) V1.3.0
  • Easy to exchange plug & play sensor element with on-board calibration data – guarantees high reproducibility and low cost of ownership
  • Selectable output signal for easy integration
  • Optional atmospheric switch, display and digital interfaces
  • Compliance & standards: CE, EN, UL, CSA, RoHS

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  Inficon – PBR 260

  Advantages

  • PBR 260 Pirani/Bayard-Alpert hot cathode combination gauge offers general vacuum measurement and control in the low to ultrahigh vacuum range with just one compact measuring device
  • Flange size: DN 25 ISO-KF, DN 40 CF-R, DN 40 ISO-KF
  • Maximum pressure applies to inert gases and temperatures of less then 55°C
  • Highly accurate, excellent repeatability in the process range 10^-8 … 10^-2 mbar
  • Bayard-Alpert sensor ON/OFF automatically controlled by Pirani sensor
  • Long-life yttrium oxide coated iridium filament
  • RoHS compliance

  Drop in compatible to other manufacturers PBR 260 Pirani/Bayard-Alpert hot cathode gauges

  • Part number IGG27000 matches PT R27 000
  • Part number IGG27001 matches PT R27 001
  • Part number IGG27002 matches PT R27 00

  Typical applications

  • General pressure measurement in semiconductor and analytical process environment
  • Optical and other industrial coating processes

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  Inficon – PSG50x

  Advantages

  • Easy push button ATM and HV adjustment
  • Space saving rugged design
  • Aluminum housing
  • Mounts in any orientation
  • Stainless steel measuring cell with metal-sealed feedthrough
  • Logarithmic signal output for easy integration
  • 10 bar absolute overpressure with threaded connections
  • 250 °C bakeable version
  • Nickel filament option for corrosive applications
  • Ceramic feedthrough for extremely corrosive applications (PSG510 & PSG512)
  • Optional setpoints
  • RoHS compliance

  Typical applications

  • Controlling high vacuum ionization gauges
  • Fore vacuum pressure monitoring
  • Safety circuits in vacuum systems
  • General vacuum measurement and control in the fine and rough vacuum range

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  Inficon – Porter CDG020D

  Benefits

  • Excellent span stability – gas type independent
  • Alumina sensor
  • Compact, smallest size in it’s class
  • Easy integration, any mounting orientation
  • Digital signal processing
  • Maintenance free

  Typical applications

  • Vacuum coating
  • Vacuum monitoring
  • Sterilization
  • Food & packaging
  • Vacuum oven, puller
  • Analytical
  • Chemical vacuum processes

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