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Inficon – IRC081
$0.00
- Operating and display solution for accurate vacuum pressure measurement
- User control on all IRG080 gauge parameters set
- Simple manual operation with 5 potentiometers
- User Interface connection via USB-B port to PC
- PC Software in LabVIEWTM
- Data log and parameter log functionality
- External port for status and vacuum interlock
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Inficon – Augent OPG550
$0.00Add to cartAdvantages
- High speed leak detection allows chamber leak test
- Increase of productivity and yield
- Long life time, no filament burns, air inrush protection
- Withstand process chemistry
- Smart algorithm for easy integration
- Compact design and small footprint
- Reliable and fast start up
Typical Applications
- Chamber leak check, faster RoR (rate of rise) test
- Leak check to find internal leaks from gas supply lines
- Real time end point control
- Gas type and concentrations control
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Inficon – MPG40X
$0.00Add to cartAdvantages
- Combination gauge – Inverted Magnetron & Pirani
- Wide measurement range from 5 x 10-9 mbar to atmosphere
- No filament to burn out
- Excellent ignition properties
- Easy to clean
- FPM or metal-sealed feedthrough
- LED indicator for high voltage on
- Logarithmic analog output signal
Typical applications
- High vacuum pressure monitoring
- Base pressure for evaporation and sputtering systems
- General vacuum measurement and control in the medium and high vacuum range
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Inficon – PCG55x
$0.00Add to cart- Gas type independent above 10 mbar – allows safe venting with any gas mixture
- High accuracy and reproducibility at atmosphere – for reliable, fast atmospheric pressure detection
- Versatile of mounting orientation – provides engineering freedom in tool design
- Available with Tungsten (PCG550) or Nickel (PCG552) filament or with a fully ceramic coated (PCG554) sensor unit for highly corrosive applications
- Latest EtherCAT protocol Standard ETG.5003.2080 S (R) V1.3.0
- Easy to exchange plug & play sensor element with on-board calibration data – guarantees high reproducibility and low cost of ownership
- Selectable output signal for easy integration
- Optional atmospheric switch, display and digital interfaces
- Compliance & standards: CE, EN, UL, CSA, RoHS
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Inficon – SK CDG025D
$0.00Add to cartAdvantages
- Full scale ranges from 100 mTorr … 1000 Torr
- Fast stability after power on
- Fast recovery from atmospheric pressure
- Corrosion resistant ceramic sensor
- Excellent long term signal stability
- Temperature compensated
- Sensor protected from contamination
- One pushbutton zero function
- Wide range power supply
Typical Applications
- Semiconductor manufacturing equipment for Etch, CVD, PVD, ALD
- Data storage and display manufacturing equipment
- Industrial vacuum equipment
- General high accuracy pressure measurement
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Inficon – Porter CDG020D
$0.00Add to cartBenefits
- Excellent span stability – gas type independent
- Alumina sensor
- Compact, smallest size in it’s class
- Easy integration, any mounting orientation
- Digital signal processing
- Maintenance free
Typical applications
- Vacuum coating
- Vacuum monitoring
- Sterilization
- Food & packaging
- Vacuum oven, puller
- Analytical
- Chemical vacuum processes
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