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Inficon – MAG084
Advantages
- Developed to sustain operation in strong external magnetic fields
- Reliable and proven gauge head design, based on the inverted magnetron principle
- Innovative double ionization chamber principle
- Bakeable to 230 °C
- Good ignition properties
- Corrosion resistant with ceramic feedthrough
- Radiation resistant design to 1×107 Gy
- Easy to maintain, low cost of ownership
Typical applications
- Special Fusion and R&D applications presenting strong external magnetic fields
Related products
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Inficon – HPG400
Add to cartAdvantages
- HPG400 saves cost and tool space and reduces the complexity of vacuum system installation and setup
- The high pressure hot ion gauge delivers accurate, reliable pressure measurements from 1×10-5 … 1 mbar for improved process control
- User selectable hot ion emission activation between 5×10-2 and 1 mbar
- Pirani interlock protects the hot filament from premature burnout
- Optional graphic display and Fieldbus interfaces available
- Automatic high vacuum Pirani adjustment reduces operator interventions
- RoHS compliance
Typical applications
- Sputter applications in semiconductor manufacturing, electronics and media industry
- Industrial coating
- General vacuum measurement and control in the low to high vacuum range
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Inficon – PGE300
Add to cartAdvantages
- Convection Enhanced Pirani Technology for wide measurement range and higher accuracy near atmosphere
- All-in-One active gauge with built-in display, 1 set point and 3 selectable analog output signals
- Bright digital LED display features a user friendly for calibration and operation
- 3 optional analog output signals (user selectable)
- Factory pre-set analog output signal or selectable via user interface
- Factory pre-set display units or selectable via user interface
- User programmable set point relays
- Gold plated tungsten filament
- Mechanical strength, highly robust and less susceptible to mechanical shock and vibration
- Choice of flange options
- Compliance & standards: CE, RoHS
- Direct drop in replaces most Granville-Phillips® Mini-Convectron® modules (GP275) and ideal device forupgrading your installed thermocouple gauges (Granville-Phillips® and Mini-Convectron® are registered trademarks of MKS Instruments, Andover, MA)
Typical applications
- Fore vacuum pressure measurement
- General vacuum measurement and control from low to the high vacuum range
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Inficon – BPG400
Add to cartAdvantages
- Extremely wide measurement range from 5×10-10 mbar to atmosphere (3.8×10-10 Torr to atmosphere)
- Excellent repeatability in the process pressure range from 10-8 … 10-2 mbar of 5%
- The Pirani interlock protects the Bayard-Alpert system from premature filament burnout and excess contamination from high pressure operation
- Long-life yttrium oxide coated iridium filament
- Optional graphic display and Fieldbus interfaces available
- Automatic high vacuum Pirani adjustment reduces operator interventions
- RoHS compliance
- General vacuum measurement and control in the low to ultra high vacuum range
Typical applications
- Pressure measurement in semiconductor process and transfer chambers
- Industrial coating
- General vacuum measurement and control in the low to ultra high vacuum range
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Inficon – PSG55x
Add to cartAdvantages
- Available with Tungsten (PSG550) or Nickel (PSG552) filament or with a fully ceramic coated (PSG554) sensor unit for highly corrosive applications
- Optional display, setpoints and digital interfaces
- Latest EtherCAT protocol Standard ETG.5003.2080 S (R) V1.3.0
- Easy to exchange plug & play sensor element with on-board calibration data – guarantees high reproducibility and low cost of ownership
- Selectable output signal and various plug versions for easy integration
- Mounts in any orientation – provides engineering freedom in tool design
- Diagnostic port on all versions
- Compliance & standards: CE, EN, UL, CSA, RoHS
Typical applications
- Â Fore vacuum pressure measurement
- Â Safety circuits in vacuum systems
- Â General vacuum measurement and control from low to the high vacuum range
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Inficon- TPG36x
Add to cartAs multifunctional controllers for process measurement, control and data logging, the TPG361 and TPG362 active pressure gauge controllers are designed to work seamlessly with a wide range of active compact pressure gauges. They efficiently manage and log data across a comprehensive pressure range from 10-10Â to 1500 mbar (10-10Â to 1125 Torr).
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