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Inficon – MAG470
Advantages
- No filament to burn out
- Extended version, sensor bakeout up to 250°C
- Excellent ignition properties
- Easy to clean
- Metal-sealed feedthrough
- LED indicator for high voltage on
- Logarithmic analog output signal
Typical applications
- Ultra high vacuum pressure monitoring
- Base pressure for evaporation and sputtering systems
- General vacuum measurement and control in the medium and high vacuum range
Related products
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Inficon – BAG402
Add to cartAdvantages
- Measurement range from 5×10-10 mbar to 2.7×10-2 mbar (3.75×10-10 Torr to 5×10-2 Torr)
- Excellent repeatability in the process pressure range from 10-8 … 10-2 mbar of 5%
- Overpressure detection protects the filament from premature burnout
- Two long-life yttrium oxide coated iridium filaments
- Automatic emission current selection reduces control complexity
- Easy to exchange sensing element with on-board calibration data guarantees high reproducibility
- RoHS compliance
Typical applications
- Pressure measurement in semiconductor process and transfer chambers
- Industrial coating
- General vacuum measurement and control in the low to ultra high vacuum range
-
Inficon – Trigon BAG552
Add to cartAdvantages
- Pure Bayard-Alpert measuring system for a wide UHV & HV measurement range
- 2 filaments for Bayard-Alpert system
- Galvanic isolated electronics to avoid electric stray current
- Sliding emission mode to avoid pressure jumps and freeze when switching the emission stream
- Extended bakeability due to removable calibration data chips
- Set point relays
- Bright & big OLED display (90° rotateable) with user interface
- Analog output, RS232C serial interface, EtherCAT®
- Usable in conjunction with VGC50x Controller series
- RoHS compliance
Typical applications
- Pressure measurement in Semiconductor processes
- Industrial coating
- General vacuum measurement and control on systems in the high to ultra high vacuum range
-
Inficon – Porter CDG020D
Add to cartBenefits
- Excellent span stability – gas type independent
- Alumina sensor
- Compact, smallest size in it’s class
- Easy integration, any mounting orientation
- Digital signal processing
- Maintenance free
Typical applications
- Vacuum coating
- Vacuum monitoring
- Sterilization
- Food & packaging
- Vacuum oven, puller
- Analytical
- Chemical vacuum processes
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Inficon – BCG450
Add to cartAdvantages
- BCG450 saves cost and tool space and reduces the complexity of vacuum measurement installation and setup
- Gas-type-independent pressure measurement above 10 Torr provides more reliable loadlock control for any gas mixture
- Pirani interlock protects the hot filament from premature burnout
- Automatic high vacuum Pirani adjustment reduces operator interventions
- Differential pressure measurement at atmosphere eliminates uncertainty related to atmospheric pressure changes
- Easy-to-exchange sensing element with on-board calibration data guarantees reproducibility
- Optional graphic display and Fieldbus interfaces available
- RoHS compliance
Typical applications
- Pressure measurement in Semiconductor process, transfer and loadlock chambers
- Industrial coating
- General vacuum measurement and control on systems in the low to ultra high vacuum range
-
Inficon – BPG402-Sx
Add to cartAdvantages
- Extremely wide measurement range from 5×10-10 mbar to atmosphere (3.8×10-10 Torr to atmosphere)
- Excellent repeatability in the process pressure range from 10-8 … 10-2 mbar of 5%
- Pirani interlock protects the filament from premature burnout
- Two long-life yttrium oxide coated iridium filaments
- Optional graphic display and Fieldbus interfaces available
- Automatic high vacuum Pirani adjustment reduces operator interventions
- Easy to exchange sensing element with on-board calibration data guarantees high reproducibility
- RoHS compliance
Typical applications
- Pressure measurement in semiconductor process and transfer chambers
- Industrial coating
- General vacuum measurement and control in the low to ultra high vacuum range
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