Inficon – Porter CDG020D

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  Inficon – PBR 260

  $0.00

  Advantages

  • PBR 260 Pirani/Bayard-Alpert hot cathode combination gauge offers general vacuum measurement and control in the low to ultrahigh vacuum range with just one compact measuring device
  • Flange size: DN 25 ISO-KF, DN 40 CF-R, DN 40 ISO-KF
  • Maximum pressure applies to inert gases and temperatures of less then 55°C
  • Highly accurate, excellent repeatability in the process range 10^-8 … 10^-2 mbar
  • Bayard-Alpert sensor ON/OFF automatically controlled by Pirani sensor
  • Long-life yttrium oxide coated iridium filament
  • RoHS compliance

  Drop in compatible to other manufacturers PBR 260 Pirani/Bayard-Alpert hot cathode gauges

  • Part number IGG27000 matches PT R27 000
  • Part number IGG27001 matches PT R27 001
  • Part number IGG27002 matches PT R27 00

  Typical applications

  • General pressure measurement in semiconductor and analytical process environment
  • Optical and other industrial coating processes

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  Inficon – Trigon BAG552

  $0.00

  Advantages

  • Pure Bayard-Alpert measuring system for a wide UHV & HV measurement range
  • 2 filaments for Bayard-Alpert system
  • Galvanic isolated electronics to avoid electric stray current
  • Sliding emission mode to avoid pressure jumps and freeze when switching the emission stream
  • Extended bakeability due to removable calibration data chips
  • Set point relays
  • Bright & big OLED display (90° rotateable) with user interface
  • Analog output, RS232C serial interface, EtherCAT®
  • Usable in conjunction with VGC50x Controller series
  • RoHS compliance

  Typical applications

  • Pressure measurement in Semiconductor processes
  • Industrial coating
  • General vacuum measurement and control on systems in the high to ultra high vacuum range

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  Inficon – SK CDG025D

  $0.00

  Advantages

  • Full scale ranges from 100 mTorr … 1000 Torr
  • Fast stability after power on
  • Fast recovery from atmospheric pressure
  • Corrosion resistant ceramic sensor
  • Excellent long term signal stability
  • Temperature compensated
  • Sensor protected from contamination
  • One pushbutton zero function
  • Wide range power supply

  Typical Applications

  • Semiconductor manufacturing equipment for Etch, CVD, PVD, ALD
  • Data storage and display manufacturing equipment
  • Industrial vacuum equipment
  • General high accuracy pressure measurement

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  Inficon – PCG55x

  $0.00

  • Gas type independent above 10 mbar – allows safe venting with any gas mixture
  • High accuracy and reproducibility at atmosphere – for reliable, fast atmospheric pressure detection
  • Versatile of mounting orientation – provides engineering freedom in tool design
  • Available with Tungsten (PCG550) or Nickel (PCG552) filament or with a fully ceramic coated (PCG554) sensor unit for highly corrosive applications
  • Latest EtherCAT protocol Standard ETG.5003.2080 S (R) V1.3.0
  • Easy to exchange plug & play sensor element with on-board calibration data – guarantees high reproducibility and low cost of ownership
  • Selectable output signal for easy integration
  • Optional atmospheric switch, display and digital interfaces
  • Compliance & standards: CE, EN, UL, CSA, RoHS

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  Inficon – MPG40X

  $0.00

  Advantages

  • Combination gauge – Inverted Magnetron & Pirani
  • Wide measurement range from 5 x 10^-9 mbar to atmosphere
  • No filament to burn out
  • Excellent ignition properties
  • Easy to clean
  • FPM or metal-sealed feedthrough
  • LED indicator for high voltage on
  • Logarithmic analog output signal

  Typical applications

  • High vacuum pressure monitoring
  • Base pressure for evaporation and sputtering systems
  • General vacuum measurement and control in the medium and high vacuum range

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