Inficon – Porter CDG020D

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  Inficon – PCG55x

  • Gas type independent above 10 mbar – allows safe venting with any gas mixture
  • High accuracy and reproducibility at atmosphere – for reliable, fast atmospheric pressure detection
  • Versatile of mounting orientation – provides engineering freedom in tool design
  • Available with Tungsten (PCG550) or Nickel (PCG552) filament or with a fully ceramic coated (PCG554) sensor unit for highly corrosive applications
  • Latest EtherCAT protocol Standard ETG.5003.2080 S (R) V1.3.0
  • Easy to exchange plug & play sensor element with on-board calibration data – guarantees high reproducibility and low cost of ownership
  • Selectable output signal for easy integration
  • Optional atmospheric switch, display and digital interfaces
  • Compliance & standards: CE, EN, UL, CSA, RoHS

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  Inficon – Augent OPG550

  Advantages

  • High speed leak detection allows chamber leak test
  • Increase of productivity and yield
  • Long life time, no filament burns, air inrush protection
  • Withstand process chemistry
  • Smart algorithm for easy integration
  • Compact design and small footprint
  • Reliable and fast start up

  Typical Applications

  • Chamber leak check, faster RoR (rate of rise) test
  • Leak check to find internal leaks from gas supply lines
  • Real time end point control
  • Gas type and concentrations control

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  Inficon – PPG570

  Advantages

  • Gas type independent above 2 mbar – allows safe venting with any gas mixture
  • High accuracy and reproducibility at atmosphere – for reliable, fast atmospheric pressure detection
  •  Atmospheric ambient pressure measurement
  • Up to 3 solid state relays
  • Versatile of mounting orientation – provides engineering freedom in tool design
  •  Selectable analog output signal for easy system integration
  • Digital interfaces RS232/ RS485
  • Able to direct drop in replace MKS901P “MicroPirani™ – and Piezo Loadlock Vacuum Pressure Transducer”.
  • Compliance & standards: CE, EN, UL, CSA, RoHS

  Typical applications

  • Semiconductor load-lock applications
  • Use in Analytical equipment/ mass sepctrometers
  • Physical vapor deposition
  • Physical vapor deposition

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  Inficon – PGE300

  Advantages

  • Convection Enhanced Pirani Technology for wide measurement range and higher accuracy near atmosphere
  • All-in-One active gauge with built-in display, 1 set point and 3 selectable analog output signals
  • Bright digital LED display features a user friendly for calibration and operation
  • 3 optional analog output signals (user selectable)
  • Factory pre-set analog output signal or selectable via user interface
  • Factory pre-set display units or selectable via user interface
  • User programmable set point relays
  • Gold plated tungsten filament
  • Mechanical strength, highly robust and less susceptible to mechanical shock and vibration
  • Choice of flange options
  • Compliance & standards: CE, RoHS
  • Direct drop in replaces most Granville-Phillips^® Mini-Convectron^® modules (GP275) and ideal device forupgrading your installed thermocouple gauges (Granville-Phillips^® and Mini-Convectron^® are registered trademarks of MKS Instruments, Andover, MA)

  Typical applications

  • Fore vacuum pressure measurement
  • General vacuum measurement and control from low to the high vacuum range

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  Inficon – IRC081

  • Operating and display solution for accurate vacuum pressure measurement
  • User control on all IRG080 gauge parameters set
  • Simple manual operation with 5 potentiometers
  • User Interface connection via USB-B port to PC
  • PC Software in LabVIEW^TM
  • Data log and parameter log functionality
  • External port for status and vacuum interlock

   

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