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Inficon – PSG010, PSG017 & PSG018
Advantages
- Elastomer (PSG010) or metal-sealed (PSG017, PSG018) design
- Specified high measurement accuracy and repeatability
- Bake-out temperature up to 100 °C (PSG010) / 250 °C (PSG017, PSG018)
- Ionizing radiation resistant up to 106 Gy (PSG017, PSG018)
- Corrosion resistance with Ni filament (PSG017)
- Cable length up to 100 m (500 m with PI 300 DL/CP 300 T11L)
Typical applications
- General vacuum measurement and control for demanding and/or high temperature applications from low to the high vacuum range
Related products
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Inficon – Trigon BAG552
Add to cartAdvantages
- Pure Bayard-Alpert measuring system for a wide UHV & HV measurement range
- 2 filaments for Bayard-Alpert system
- Galvanic isolated electronics to avoid electric stray current
- Sliding emission mode to avoid pressure jumps and freeze when switching the emission stream
- Extended bakeability due to removable calibration data chips
- Set point relays
- Bright & big OLED display (90° rotateable) with user interface
- Analog output, RS232C serial interface, EtherCAT®
- Usable in conjunction with VGC50x Controller series
- RoHS compliance
Typical applications
- Pressure measurement in Semiconductor processes
- Industrial coating
- General vacuum measurement and control on systems in the high to ultra high vacuum range
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Inficon – PCG55x
Add to cart- Gas type independent above 10 mbar – allows safe venting with any gas mixture
- High accuracy and reproducibility at atmosphere – for reliable, fast atmospheric pressure detection
- Versatile of mounting orientation – provides engineering freedom in tool design
- Available with Tungsten (PCG550) or Nickel (PCG552) filament or with a fully ceramic coated (PCG554) sensor unit for highly corrosive applications
- Latest EtherCAT protocol Standard ETG.5003.2080 S (R) V1.3.0
- Easy to exchange plug & play sensor element with on-board calibration data – guarantees high reproducibility and low cost of ownership
- Selectable output signal for easy integration
- Optional atmospheric switch, display and digital interfaces
- Compliance & standards: CE, EN, UL, CSA, RoHS
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Inficon – PSG50x
Add to cartAdvantages
- Easy push button ATM and HV adjustment
- Space saving rugged design
- Aluminum housing
- Mounts in any orientation
- Stainless steel measuring cell with metal-sealed feedthrough
- Logarithmic signal output for easy integration
- 10 bar absolute overpressure with threaded connections
- 250 °C bakeable version
- Nickel filament option for corrosive applications
- Ceramic feedthrough for extremely corrosive applications (PSG510 & PSG512)
- Optional setpoints
- RoHS compliance
Typical applications
- Controlling high vacuum ionization gauges
- Fore vacuum pressure monitoring
- Safety circuits in vacuum systems
- General vacuum measurement and control in the fine and rough vacuum range
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Inficon – PPG550
Add to cartAdvantages
- Gas type independent above 2 mbar – allows safe venting with any gas mixture
- High accuracy and reproducibility at atmosphere – for reliable, fast atmospheric pressure detection
- Versatile of mounting orientation – provides engineering freedom in tool design
- Selectable analog output signal for easy system integration
- Digital interfaces RS232/ RS485
- Compliance & standards: CE, EN, UL, CSA, RoHS
- Able to direct drop in replace MKS910 “DualTrans™ MicroPirani™ – Absolute Piezo Vacuum Pressure Transducers” as well as MKS925 “Micro Pirani™ Vacuum Pressure Transducers”. DualTrans™ MicroPirani™ are registered trademarks of MKS Instruments, Andover, MA
- Compliance & standards: CE, EN, UL, CSA, RoHS
Typical applications
- Use in Analytical equipment/ mass spectrometers
- Physical vapor deposition
- Fore-line measurement
- Gas-backfilling
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Inficon – PGE500 DeviceNet
Add to cartAdvantages
- Convection Enhanced Pirani Technology for wide measurement range and higher accuracy near atmosphere
- All-in-One active gauge with built-in display, 2 set points, and digital DeviceNet interface
- Bright digital OLED display with keypad for simple setup, calibration and operation
- Factory pre-set display units for measure or selectable via keypad
- User programmable set point relays (factory pre-set on request for volume orders)
- Gold plated tungsten filament or platinum filament for corrosive applications
- Mechanical strength, highly robust and less susceptible to mechanical shock and vibration
- Field replaceable spare sensor units
- Choice of flange options
- Compliance & standards: CE, RoHS
- Direct drop-in plug-compatible replacement for the DeviceNet versions of MKS / Granville-Phillips® Mini-Convectron® (GP275 Modules) Granville-Phillips® and Mini-Convectron® are registered trademarks of MKS Instruments, Andover, MA
Typical applications
- Fore vacuum pressure measurement
- General vacuum measurement and control form low to the high vacuum range
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