Inficon – Spot CDS500D

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  Inficon – Augent OPG550

  Advantages

  • High speed leak detection allows chamber leak test
  • Increase of productivity and yield
  • Long life time, no filament burns, air inrush protection
  • Withstand process chemistry
  • Smart algorithm for easy integration
  • Compact design and small footprint
  • Reliable and fast start up

  Typical Applications

  • Chamber leak check, faster RoR (rate of rise) test
  • Leak check to find internal leaks from gas supply lines
  • Real time end point control
  • Gas type and concentrations control

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  Inficon – PGE500 RS485/ Analog

  Advantages

  • Convection Enhanced Pirani Technology for wide measurement range and higher accuracy near atmosphere
  • All-in-One active gauge with built-in display, 2 set points, 4 analog output signals, and 2 digital interfaces
  • Bright digital OLED display with keypad for simple setup, calibration and operation
  • 4 optional analog output signals (3 user selectable, 1 Default)
  • Factory pre-set analog output signal or selectable via keypad
  • Factory pre-set display units or selectable via keypad
  • User programmable set point relays (factory pre-set on request for volume orders)
  • Gold plated tungsten filament
  • Mechanical strength, highly robust and less susceptible to mechanical shock and vibration
  • Choice of flange options
  • Compliance & standards: CE, RoHS
  • Direct drop in replaces most Granville-Phillips^® Mini-Convectron^® modules (GP275) (Granville-Phillips^® and Mini-Convectron^® are registered trademarks of MKS Instruments, Andover, MA)

  Typical applications

  • Fore vacuum pressure measurement
  • General vacuum measurement and control form low to the high vacuum range

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  Inficon- TPG36x

  As multifunctional controllers for process measurement, control and data logging, the TPG361 and TPG362 active pressure gauge controllers are designed to work seamlessly with a wide range of active compact pressure gauges. They efficiently manage and log data across a comprehensive pressure range from 10^-10 to 1500 mbar (10^-10 to 1125 Torr).

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  Inficon – Trigon BAG552

  Advantages

  • Pure Bayard-Alpert measuring system for a wide UHV & HV measurement range
  • 2 filaments for Bayard-Alpert system
  • Galvanic isolated electronics to avoid electric stray current
  • Sliding emission mode to avoid pressure jumps and freeze when switching the emission stream
  • Extended bakeability due to removable calibration data chips
  • Set point relays
  • Bright & big OLED display (90° rotateable) with user interface
  • Analog output, RS232C serial interface, EtherCAT®
  • Usable in conjunction with VGC50x Controller series
  • RoHS compliance

  Typical applications

  • Pressure measurement in Semiconductor processes
  • Industrial coating
  • General vacuum measurement and control on systems in the high to ultra high vacuum range

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  Inficon – HPG400

  Advantages

  • HPG400 saves cost and tool space and reduces the complexity of vacuum system installation and setup
  • The high pressure hot ion gauge delivers accurate, reliable pressure measurements from 1×10^-5 … 1 mbar for improved process control
  • User selectable hot ion emission activation between 5×10^-2 and 1 mbar
  • Pirani interlock protects the hot filament from premature burnout
  • Optional graphic display and Fieldbus interfaces available
  • Automatic high vacuum Pirani adjustment reduces operator interventions
  • RoHS compliance

  Typical applications

  • Sputter applications in semiconductor manufacturing, electronics and media industry
  • Industrial coating
  • General vacuum measurement and control in the low to high vacuum range

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