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Inficon – Stripe CDG100Dhs
$0.00
Advantages
- High productivity – Faster than 2 ms response time
- Flexible integration – EtherCAT fieldbus
- Long lifetime – Proven ceramic sensor
- Forget recalibration – 90 ppm/year full scale stability
Typical applications
- Atomic layer deposition
- High speed process control
- PVD, CVD, Etch
- General high temperature vacuum applications
Related products
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Inficon – PBR 260
$0.00Add to cartAdvantages
- PBR 260 Pirani/Bayard-Alpert hot cathode combination gauge offers general vacuum measurement and control in the low to ultrahigh vacuum range with just one compact measuring device
- Flange size: DN 25 ISO-KF, DN 40 CF-R, DN 40 ISO-KF
- Maximum pressure applies to inert gases and temperatures of less then 55°C
- Highly accurate, excellent repeatability in the process range 10-8 … 10-2 mbar
- Bayard-Alpert sensor ON/OFF automatically controlled by Pirani sensor
- Long-life yttrium oxide coated iridium filament
- RoHS compliance
Drop in compatible to other manufacturers PBR 260 Pirani/Bayard-Alpert hot cathode gauges
- Part number IGG27000 matches PT R27 000
- Part number IGG27001 matches PT R27 001
- Part number IGG27002 matches PT R27 00
Typical applications
- General pressure measurement in semiconductor and analytical process environment
- Optical and other industrial coating processes
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Inficon- TPG36x
$0.00Add to cartAs multifunctional controllers for process measurement, control and data logging, the TPG361 and TPG362 active pressure gauge controllers are designed to work seamlessly with a wide range of active compact pressure gauges. They efficiently manage and log data across a comprehensive pressure range from 10-10 to 1500 mbar (10-10 to 1125 Torr).
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Inficon – Augent OPG550
$0.00Add to cartAdvantages
- High speed leak detection allows chamber leak test
- Increase of productivity and yield
- Long life time, no filament burns, air inrush protection
- Withstand process chemistry
- Smart algorithm for easy integration
- Compact design and small footprint
- Reliable and fast start up
Typical Applications
- Chamber leak check, faster RoR (rate of rise) test
- Leak check to find internal leaks from gas supply lines
- Real time end point control
- Gas type and concentrations control
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Inficon – BPG400
$0.00Add to cartAdvantages
- Extremely wide measurement range from 5×10-10 mbar to atmosphere (3.8×10-10 Torr to atmosphere)
- Excellent repeatability in the process pressure range from 10-8 … 10-2 mbar of 5%
- The Pirani interlock protects the Bayard-Alpert system from premature filament burnout and excess contamination from high pressure operation
- Long-life yttrium oxide coated iridium filament
- Optional graphic display and Fieldbus interfaces available
- Automatic high vacuum Pirani adjustment reduces operator interventions
- RoHS compliance
- General vacuum measurement and control in the low to ultra high vacuum range
Typical applications
- Pressure measurement in semiconductor process and transfer chambers
- Industrial coating
- General vacuum measurement and control in the low to ultra high vacuum range
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Inficon – PPG550
$0.00Add to cartAdvantages
- Gas type independent above 2 mbar – allows safe venting with any gas mixture
- High accuracy and reproducibility at atmosphere – for reliable, fast atmospheric pressure detection
- Versatile of mounting orientation – provides engineering freedom in tool design
- Selectable analog output signal for easy system integration
- Digital interfaces RS232/ RS485
- Compliance & standards: CE, EN, UL, CSA, RoHS
- Able to direct drop in replace MKS910 “DualTrans™ MicroPirani™ – Absolute Piezo Vacuum Pressure Transducers” as well as MKS925 “Micro Pirani™ Vacuum Pressure Transducers”. DualTrans™ MicroPirani™ are registered trademarks of MKS Instruments, Andover, MA
- Compliance & standards: CE, EN, UL, CSA, RoHS
Typical applications
- Use in Analytical equipment/ mass spectrometers
- Physical vapor deposition
- Fore-line measurement
- Gas-backfilling
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