Advanced controller for process measurement and data recording
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Inficon- TPG36x
$0.00
As multifunctional controllers for process measurement, control and data logging, the TPG361 and TPG362 active pressure gauge controllers are designed to work seamlessly with a wide range of active compact pressure gauges. They efficiently manage and log data across a comprehensive pressure range from 10-10 to 1500 mbar (10-10 to 1125 Torr).
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Inficon – Trigon BAG552
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- Pure Bayard-Alpert measuring system for a wide UHV & HV measurement range
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- Galvanic isolated electronics to avoid electric stray current
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Typical applications
- Pressure measurement in Semiconductor processes
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Inficon – MPG40X
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- Combination gauge – Inverted Magnetron & Pirani
- Wide measurement range from 5 x 10-9 mbar to atmosphere
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Typical applications
- High vacuum pressure monitoring
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Inficon – BPG402-Sx
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- Extremely wide measurement range from 5×10-10 mbar to atmosphere (3.8×10-10 Torr to atmosphere)
- Excellent repeatability in the process pressure range from 10-8 … 10-2 mbar of 5%
- Pirani interlock protects the filament from premature burnout
- Two long-life yttrium oxide coated iridium filaments
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- RoHS compliance
Typical applications
- Pressure measurement in semiconductor process and transfer chambers
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Inficon – PSG50x
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- Easy push button ATM and HV adjustment
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- Aluminum housing
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- Logarithmic signal output for easy integration
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- 250 °C bakeable version
- Nickel filament option for corrosive applications
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Typical applications
- Controlling high vacuum ionization gauges
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Inficon – PPG570
$0.00Add to cartAdvantages
- Gas type independent above 2 mbar – allows safe venting with any gas mixture
- High accuracy and reproducibility at atmosphere – for reliable, fast atmospheric pressure detection
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- Up to 3 solid state relays
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Typical applications
- Semiconductor load-lock applications
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