Advanced controller for process measurement and data recording
Inficon- TPG36x
$0.00
As multifunctional controllers for process measurement, control and data logging, the TPG361 and TPG362 active pressure gauge controllers are designed to work seamlessly with a wide range of active compact pressure gauges. They efficiently manage and log data across a comprehensive pressure range from 10-10Â to 1500 mbar (10-10Â to 1125 Torr).
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- Overpressure detection protects the filament from premature burnout
- Two long-life yttrium oxide coated iridium filaments
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Typical applications
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Inficon – BPG400
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- Extremely wide measurement range from 5×10-10 mbar to atmosphere (3.8×10-10 Torr to atmosphere)
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- The Pirani interlock protects the Bayard-Alpert system from premature filament burnout and excess contamination from high pressure operation
- Long-life yttrium oxide coated iridium filament
- Optional graphic display and Fieldbus interfaces available
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- Pressure measurement in semiconductor process and transfer chambers
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Inficon – Augent OPG550
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- High speed leak detection allows chamber leak test
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