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Inficon – VSC150A
Advantages
- High switching accuracy (± 0.1 mbar)
- Stable long term operating characteristics
- Rugged, corrosion protected design
Typical Applications
- Pressure switch or differential pressure switch to control valves, pumps, power supplies
- Load lock chambers
- Process chambers
Related products
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Inficon – Gemini MxG5xx
Read moreAdvantages
- Long lifetime in harsh environments
- Low magnetic stray field
- Reliable fast ignition
- Fastest maintenance – replaceable insert
- Compact size – easy to integrate
- Corrosion proof feed-through & sensor element
- Selectable measuring current
- 2 relay setpoints (in conjunction with MxG55x PROFINET and EtherCAT)
- PROFINET, EtherCAT and RS232/ RS485 digital interace
Typical applications
- Base pressure monitoring and control, from atmosphere to high vacuum in evaporation and sputter coating applications.
- General vacuum measurement – industrial furnaces, architectural glass, semiconductor, Refrigeration/ air conditioning and production laboratory`s
- Analytical and R&D applications – mass spectrometry, electron microscopes, ophthalmic, optical, medical and high energy physics.
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Inficon – Trigon BPG552
Read moreAdvantages
- Dual Gauge (2 sensing elements) for a wide measurement range, cost reduction & space savings
- 2 filaments for Bayard-Alpert system
- Pirani interlock protection to avoid premature filament burnout
- Automatic high vacuum Pirani adjustment reduces operator interventions
- Galvanic isolated electronics to avoid electric stray current
- Sliding emission mode to avoid pressure jumps and freeze when switching the emission stream
- Extended bakeability due to removable calibration data chips
- Set point relays
- Bright & big OLED display (90° rotatable) with user interface
- Analog output, RS232C serial interface, EtherCAT®
- Usable in conjunction with VGC50x Controller series
- Backwards compatible to BPG402
- RoHS compliance
Typical applications
- Pressure measurement in Semiconductor processes
- Industrial coating
- General vacuum measurement and control on systems in the low to ultra high vacuum range
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Inficon – PGE500 DeviceNet
Read moreAdvantages
- Convection Enhanced Pirani Technology for wide measurement range and higher accuracy near atmosphere
- All-in-One active gauge with built-in display, 2 set points, and digital DeviceNet interface
- Bright digital OLED display with keypad for simple setup, calibration and operation
- Factory pre-set display units for measure or selectable via keypad
- User programmable set point relays (factory pre-set on request for volume orders)
- Gold plated tungsten filament or platinum filament for corrosive applications
- Mechanical strength, highly robust and less susceptible to mechanical shock and vibration
- Field replaceable spare sensor units
- Choice of flange options
- Compliance & standards: CE, RoHS
- Direct drop-in plug-compatible replacement for the DeviceNet versions of MKS / Granville-Phillips® Mini-Convectron® (GP275 Modules) Granville-Phillips® and Mini-Convectron® are registered trademarks of MKS Instruments, Andover, MA
Typical applications
- Fore vacuum pressure measurement
- General vacuum measurement and control form low to the high vacuum range
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Inficon – Porter CDG020D
Read moreBenefits
- Excellent span stability – gas type independent
- Alumina sensor
- Compact, smallest size in it’s class
- Easy integration, any mounting orientation
- Digital signal processing
- Maintenance free
Typical applications
- Vacuum coating
- Vacuum monitoring
- Sterilization
- Food & packaging
- Vacuum oven, puller
- Analytical
- Chemical vacuum processes
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Inficon – PPG570
Read moreAdvantages
- Gas type independent above 2 mbar – allows safe venting with any gas mixture
- High accuracy and reproducibility at atmosphere – for reliable, fast atmospheric pressure detection
- Atmospheric ambient pressure measurement
- Up to 3 solid state relays
- Versatile of mounting orientation – provides engineering freedom in tool design
- Selectable analog output signal for easy system integration
- Digital interfaces RS232/ RS485
- Able to direct drop in replace MKS901P “MicroPirani™ – and Piezo Loadlock Vacuum Pressure Transducer”.
- Compliance & standards: CE, EN, UL, CSA, RoHS
Typical applications
- Semiconductor load-lock applications
- Use in Analytical equipment/ mass sepctrometers
- Physical vapor deposition
- Physical vapor deposition
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