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UV Litho S+
$5,622.00
- Minimum Line width: 0.5 um
- Minimum Feature size: 0.35 um
- Writing Speed: 300 mm2/min @ 0.5 um
- 3,000mm2/min @ 5.0 um
- Light source: LD 405nm / 375nm
- XY distance: 55mm
- Overlay Accuracy: 200nm
- Minimum sample size: 1 inch x 1 inch
- Maximum sample size: 8 inch x 8 inch
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UV-Litho-S
$3,600.00Add to cart- Minimum Line width: 1.0 um
- Minimum Feature size: 0.8 um
- Writing Speed: 1,200 mm2/min @ 1.0 um
- 3,000mm2/min @ 5.0 um
- Light source: LD 405nm / 375nm
- XY distance: 55mm
- Overlay Accuracy: 200nm
- Minimum sample size: 1 inch x 1 inch
- Maximum sample size: 8 inch x 8 inch
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UV-Litho-ACA
$550.00Add to cart- Minimum Line width: 1.0um
- Minimum Feature size: 0.8 um
- Writing Speed: 3 mm2/min @ 1um
- 20mm2/min @ 1.5um
- Light source: LED 405nm / 385nm
- XY distance: 55mm
- Overlay Accuracy: 350nm
- minimum sample size: 3mm x 3mm
- Maximum sample size: 150mm x 150 mm
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UV-Litho-Y
$6,400.00Add to cart- Minimum Line width: 1.5um
- Minimum Feature size: 1.2um
- Writing Speed: 10 mm2/min @ 1.5um
- Light source: LED 405nm / 385nm
- XY distance: 55mm
- Overlay Accuracy: 500nm
- Minimum sample size: 3mm x 3mm
- Maximum sample size: 50mm x 50 mm
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